Title:
METHOD FOR MANUFACTURING MAGNETORESISTANCE EFFECT ELEMENT, AND MAGNETORESISTANCE EFFECT ELEMENT
Document Type and Number:
WIPO Patent Application WO/2024/069733
Kind Code:
A1
Abstract:
According to the present invention, a method for manufacturing a magnetized rotary element has a measurement step, a comparison step, and a determination step. In the measurement step, a laminate comprising a first detection layer and a second detection layer is etched, and a first measurement time period from when a first signal originating from a first material included in the first detection layer is detected until a second signal originating from a second material included in the second detection layer is detected, is measured. In the comparison step, a first reference time period from when the first signal is detected until the second signal is detected when etching a reference laminate having the same film formation as the laminate, and the first measurement time period are compared, and the deviation between the first reference time period and the first measurement time period is derived. In the determination step, a condition from when the second signal is detected until the etching is finished is determined from the deviation.
Inventors:
KOMURA EIJI (JP)
Application Number:
PCT/JP2022/035871
Publication Date:
April 04, 2024
Filing Date:
September 27, 2022
Export Citation:
Assignee:
TDK CORP (JP)
International Classes:
H01L29/82
Domestic Patent References:
| WO2021181651A1 | 2021-09-16 | |||
| WO2018139276A1 | 2018-08-02 |
Foreign References:
| US20210143323A1 | 2021-05-13 | |||
| JP2019047118A | 2019-03-22 | |||
| JP2017520909A | 2017-07-27 |
Attorney, Agent or Firm:
OIKAWA Shu et al. (JP)
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