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Title:
METHOD FOR MANUFACTURING MASK
Document Type and Number:
WIPO Patent Application WO/2019/064424
Kind Code:
A1
Abstract:
Disclosed is a method for manufacturing a mask sheet (300), said method including: a film forming step for forming, on a mask substrate (301), a metal layer (302a) having a plurality of openings (304); and a shaping step for shaping the metal layer using a pulse electrolytic method.

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Inventors:
INUZUKA MASAHIRO
Application Number:
PCT/JP2017/035215
Publication Date:
April 04, 2019
Filing Date:
September 28, 2017
Export Citation:
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Assignee:
SHARP KK (JP)
International Classes:
H01L51/50; C23C14/04; H05B33/10
Foreign References:
JP2016100296A2016-05-30
JPH11222664A1999-08-17
JP2001355095A2001-12-25
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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