Title:
METHOD FOR MANUFACTURING MASK
Document Type and Number:
WIPO Patent Application WO/2019/092829
Kind Code:
A1
Abstract:
A method for manufacturing a mask sheet (300) includes a film-forming step for film-forming, on a mask substrate (101), an iron-nickel alloy layer having a plurality of openings. In the film-forming step, a plating solution (200) is circulated between a plating tank (100) and an oxidation reduction tank (110) filled with a nickel metal (111).
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Inventors:
INUZUKA MASAHIRO
Application Number:
PCT/JP2017/040429
Publication Date:
May 16, 2019
Filing Date:
November 09, 2017
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
C23C14/04; C25D1/00; C25D1/10; H01L51/50; H05B33/10
Domestic Patent References:
WO2017138166A1 | 2017-08-17 |
Foreign References:
JPS6148599A | 1986-03-10 | |||
JPS58171593A | 1983-10-08 | |||
JP2009046706A | 2009-03-05 | |||
JPH073489A | 1995-01-06 |
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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