Title:
METHOD FOR MANUFACTURING MEMS MICROPHONE
Document Type and Number:
WIPO Patent Application WO/2020/140572
Kind Code:
A1
Abstract:
Provided is a method for manufacturing an MEMS microphone, the method comprising the following steps: selecting a substrate, and manufacturing a first diaphragm structure on a first surface of the substrate; manufacturing back plate structures at intervals on a side surface, opposite the first surface of the substrate, of the first diaphragm structure, with first gaps being provided between the first diaphragm structure and the back plate structures; manufacturing second diaphragm structures at intervals on a side surface, opposite the first diaphragm structure, of the back plate structures, with second gaps being provided between the second diaphragm structures and the back plate structures; manufacturing an electrode on a side surface, opposite the back plate structures, of the second diaphragm structures; and etching a second surface, opposite the first surface, of the substrate to form a back cavity.
Inventors:
MENG ZHENKUI (CN)
LIU ZHENGYAN (CN)
LIU ZHENGYAN (CN)
Application Number:
PCT/CN2019/113322
Publication Date:
July 09, 2020
Filing Date:
October 25, 2019
Export Citation:
Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
AAC TECHNOLOGIES PTE LTD (SG)
AAC TECHNOLOGIES PTE LTD (SG)
International Classes:
H04R31/00; H04R19/04
Foreign References:
| CN110012409A | 2019-07-12 | |||
| CN104113810A | 2014-10-22 | |||
| CN106954164A | 2017-07-14 | |||
| CN105792084A | 2016-07-20 | |||
| CN103686570A | 2014-03-26 | |||
| US20070154040A1 | 2007-07-05 |
Attorney, Agent or Firm:
GUANGZHOU YUEXIU JILY PATENT & TRADEMARK LAW OFFICE (CN)
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