Title:
METHOD FOR MANUFACTURING METAL ELECTRODE HAVING GRATING-LIKE STRUCTURE, AND ELECTRODE
Document Type and Number:
WIPO Patent Application WO/2023/207053
Kind Code:
A1
Abstract:
The present application provides a method for manufacturing a metal electrode having a grating-like structure, and an electrode. The method comprises: using an ion beam etching (IBE) device to emit a first particle beam to etch a metal layer at a first angle under the shielding of a mask, so as to obtain a coarse-etched metal electrode having a grating-like structure, and using the IBE device to emit a second particle beam to etch, at a second angle, under the shielding of the mask, the coarse-etched metal electrode having a grating-like structure, so as to obtain a final metal electrode having a grating-like structure. That is, small-angle etching can be used first to initially open the metal layer to obtain the coarse-etched metal electrode having a grating-like structure, large-angle etching can then be used to modify the top of the metal layer in advance by using the shielding of the mask, and when the mask is gradually consumed, the particle beams can gradually etch to the bottom of the metal layer. In this way, sidewall metal contamination generated by the small-angle etching is effectively removed, and meanwhile, a metal sidewall at a special angle can be formed due to the etching time difference between the top and bottom of the metal layer, so as to obtain the final metal electrode having a grating-like structure, regular morphology, and low roughness.
Inventors:
WANG YAO (CN)
PENG TAIYAN (CN)
JIANG ZHONGYUAN (CN)
YANG YUXIN (CN)
XU KAIDONG (CN)
PENG TAIYAN (CN)
JIANG ZHONGYUAN (CN)
YANG YUXIN (CN)
XU KAIDONG (CN)
Application Number:
PCT/CN2022/133458
Publication Date:
November 02, 2023
Filing Date:
November 22, 2022
Export Citation:
Assignee:
JIANGSU LEUVEN INSTR CO LTD (CN)
International Classes:
H01J37/32
Foreign References:
| CN110831419A | 2020-02-21 | |||
| CN110571122A | 2019-12-13 | |||
| CN105826463A | 2016-08-03 | |||
| CN108352444A | 2018-07-31 | |||
| CN109427580A | 2019-03-05 | |||
| CN111162164A | 2020-05-15 | |||
| US20170125668A1 | 2017-05-04 |
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW CO., LTD. (CN)
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