Title:
METHOD FOR MANUFACTURING METAL THIN FILM SUPPORTED BY GLASS SUPPORT
Document Type and Number:
WIPO Patent Application WO/2018/164535
Kind Code:
A1
Abstract:
A method for manufacturing a metal thin film supported by a glass support comprises: a preparation step of preparing a glass substrate having a layer formed on an upper surface thereof; and an etching step of etching a partial region of the glass substrate from a lower surface to expose the bottom of the layer. The layer includes a metal thin film. The etching step may comprise: a first etching step of performing a first etching on the glass substrate to a depth that is less than the thickness of the glass substrate by using a first etching solution containing hydrofluoric acid and containing at least one of nitric acid and sulfuric acid; and a second etching step of performing a second etching on the first etched portion to expose the bottom of the layer by using a second etching solution containing hydrofluoric acid and not containing nitric acid and sulfuric acid.
Inventors:
OH YOON SEUK (KR)
YOON JUN RO (KR)
CHO SEO YEONG (KR)
LEE KYUNG JIN (KR)
YOON JUN RO (KR)
CHO SEO YEONG (KR)
LEE KYUNG JIN (KR)
Application Number:
PCT/KR2018/002830
Publication Date:
September 13, 2018
Filing Date:
March 09, 2018
Export Citation:
Assignee:
CORNING INC (US)
International Classes:
C03C17/36; C03C15/00
Foreign References:
| JP2014005172A | 2014-01-16 | |||
| KR20170019151A | 2017-02-21 | |||
| JPH07235750A | 1995-09-05 | |||
| KR20120140481A | 2012-12-31 | |||
| KR20150064192A | 2015-06-10 |
Attorney, Agent or Firm:
KIM, Seon-Min (KR)
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