Title:
METHOD FOR MANUFACTURING MICROLENS ARRAY, AND MICROLENS ARRAY
Document Type and Number:
WIPO Patent Application WO2010110081
Kind Code:
A1
Abstract:
Provided is a method for manufacturing a microlens array, which has, on one surface, a plurality of microlenses which protrude in a substantially hemispherical shape. The method includes a resist forming step of forming a resist layer for forming the shape of the microlenses on an organic film layer to be the material layer of the microlenses, and an etching step of etching the formed resist layer and the organic film layer using a mixed gas wherein molecules including hydrogen and molecules including fluorine are mixed.
Inventors:
YOSHIMURA SHOTA (JP)
SASAKI MASARU (JP)
SASAKI MASARU (JP)
Application Number:
PCT/JP2010/054102
Publication Date:
September 30, 2010
Filing Date:
March 11, 2010
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
YOSHIMURA SHOTA (JP)
SASAKI MASARU (JP)
YOSHIMURA SHOTA (JP)
SASAKI MASARU (JP)
International Classes:
B29D11/00; G02B3/00; G03F7/20
Foreign References:
| JP2005101232A | 2005-04-14 | |||
| JP2008505497A | 2008-02-21 | |||
| JP2007036118A | 2007-02-08 | |||
| JP2004330310A | 2004-11-25 |
Attorney, Agent or Firm:
ITOH, Hidehiko et al. (JP)
Hidehiko Ito (JP)
Hidehiko Ito (JP)
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