Title:
METHOD FOR MANUFACTURING MICROLENS ARRAY
Document Type and Number:
WIPO Patent Application WO/2017/082467
Kind Code:
A1
Abstract:
A method for manufacturing a microlens array is disclosed. In the method, first, a photoresist is applied on a substrate to form a photoresist layer. Thereafter, a part of the photoresist layer is exposed using a mask, and a thin film is formed on the photoresist layer. Subsequently, the photoresist layer on which the thin film is formed is developed, and simultaneously ultrasonic vibration is applied to cause the thin film to rise. Then, the raised thin film is subjected to an entire surface exposure to form a microlens array.
Inventors:
WON YONG HYUB (KR)
KIM JUN OH (KR)
KIM JUN OH (KR)
Application Number:
PCT/KR2015/014456
Publication Date:
May 18, 2017
Filing Date:
December 30, 2015
Export Citation:
Assignee:
KOREA ADVANCED INST SCI & TECH (KR)
International Classes:
G02B3/00; B29D11/00; G03F7/20; H01L21/027
Foreign References:
| KR101173155B1 | 2012-08-16 | |||
| JP2005242109A | 2005-09-08 | |||
| KR101528594B1 | 2015-06-12 | |||
| US20070105056A1 | 2007-05-10 | |||
| CN102540284A | 2012-07-04 |
Attorney, Agent or Firm:
YOU ME PATENT AND LAW FIRM (KR)
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