Title:
METHOD FOR MANUFACTURING NANO WIRE GRID POLARIZER
Document Type and Number:
WIPO Patent Application WO/2019/006799
Kind Code:
A1
Abstract:
A method for manufacturing a nano wire grid polarizer comprises the steps of: S1, providing a nanoimprint mold (3) and filling the nanoimprint mold (3) with a photoresist material (21a) to obtain a nanoimprint component; S2, aligning the nanoimprint component to a conductive substrate, curing the photoresist material (21a) on a surface of the conductive substrate, removing the nanoimprint mold (3), and forming nano photoresist arrays (21) on the surface of the conductive substrate, wherein a first gap array is arranged among the nano photoresist arrays (21); S3, depositing metals (13a) in the first gap array using an electro-deposition method, removing the nano photoresist arrays (21) and forming a nano wire grid (13) on the surface of the conductive substrate to obtain the nano wire grid polarizer. The polarizer manufacturing method avoids the etching process, metals of different materials and sizes can be deposited as required, and the growth rate of the metals can be controlled by adjusting an electro-deposition parameter, so that a nano wire grid having a short period and high aspect ratio can be easily obtained with a better polarization effect during application.
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Inventors:
HOU JUN (CN)
Application Number:
PCT/CN2017/095037
Publication Date:
January 10, 2019
Filing Date:
July 28, 2017
Export Citation:
Assignee:
SHENZHEN CHINA STAR OPTOELECT (CN)
International Classes:
G02B5/30; G02F1/1335; G03F7/00
Foreign References:
| CN1825146A | 2006-08-30 | |||
| US6375870B1 | 2002-04-23 | |||
| CN106324742A | 2017-01-11 | |||
| CN101271170A | 2008-09-24 |
Attorney, Agent or Firm:
MING & YUE INTELLECTUAL PROPERTY LAW FIRM (CN)
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