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Title:
METHOD FOR MANUFACTURING NOVEL COMPOUND, RAW MATERIAL FOR THIN FILM FORMATION, AND THIN FILM
Document Type and Number:
WIPO Patent Application WO/2016/203887
Kind Code:
A1
Abstract:
This novel compound is characterized by being represented by general formula (I) or (II). [In the formula, R1 and R2 each independently represent a hydrocarbon group having 1 to 12 carbon atoms, and a hydrogen atom in the hydrocarbon group may be substituted by Si(R3)3, with the proviso that R1 and R2 are different groups. R3 represents a methyl group or an ethyl group. M represents a metal atom or a silicon atom. n represents an integer from 1 to 4.]

Inventors:
YOSHINO, Tomoharu (2-35 Higashiogu 7-chome, Arakawa-k, Tokyo 54, 〒1168554, JP)
ENZU, Masaki (2-35 Higashiogu 7-chome, Arakawa-k, Tokyo 54, 〒1168554, JP)
NISHIDA, Akihiro (2-35 Higashiogu 7-chome, Arakawa-k, Tokyo 54, 〒1168554, JP)
SUGIURA, Nana (2-35 Higashiogu 7-chome, Arakawa-k, Tokyo 54, 〒1168554, JP)
Application Number:
JP2016/064573
Publication Date:
December 22, 2016
Filing Date:
May 17, 2016
Export Citation:
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Assignee:
ADEKA CORPORATION (2-35, Higashiogu 7-chome Arakawa-k, Tokyo 54, 〒1168554, JP)
International Classes:
C07F13/00; C07F15/04; C07F15/06; C23C16/18; H01L21/285
Domestic Patent References:
WO2012176989A12012-12-27
Foreign References:
JP2013545755A2013-12-26
US20150105573A12015-04-16
Attorney, Agent or Firm:
SOGA, Michiharu et al. (S. Soga & Co, 8th Floor Kokusai Building, 1-1, Marunouchi 3-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
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