Title:
METHOD FOR MANUFACTURING NOVEL COMPOUND, RAW MATERIAL FOR THIN FILM FORMATION, AND THIN FILM
Document Type and Number:
WIPO Patent Application WO/2016/203887
Kind Code:
A1
Abstract:
This novel compound is characterized by being represented by general formula (I) or (II). [In the formula, R1 and R2 each independently represent a hydrocarbon group having 1 to 12 carbon atoms, and a hydrogen atom in the hydrocarbon group may be substituted by Si(R3)3, with the proviso that R1 and R2 are different groups. R3 represents a methyl group or an ethyl group. M represents a metal atom or a silicon atom. n represents an integer from 1 to 4.]
Inventors:
YOSHINO TOMOHARU (JP)
ENZU MASAKI (JP)
NISHIDA AKIHIRO (JP)
SUGIURA NANA (JP)
ENZU MASAKI (JP)
NISHIDA AKIHIRO (JP)
SUGIURA NANA (JP)
Application Number:
PCT/JP2016/064573
Publication Date:
December 22, 2016
Filing Date:
May 17, 2016
Export Citation:
Assignee:
ADEKA CORP (JP)
International Classes:
C07F13/00; C07F15/04; C07F15/06; C23C16/18; H01L21/285
Domestic Patent References:
| WO2012176989A1 | 2012-12-27 |
Foreign References:
| JP2013545755A | 2013-12-26 | |||
| US20150105573A1 | 2015-04-16 |
Other References:
See also references of EP 3312187A4
Attorney, Agent or Firm:
SOGA, Michiharu et al. (JP)
Michiharu Soga (JP)
Michiharu Soga (JP)
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