Title:
METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION DEVICE AND LIGHT BEAM IRRADIATION PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/096436
Kind Code:
A1
Abstract:
A method for manufacturing a photoelectric conversion device, by which a light beam (22) is irradiated onto the position determined on the basis of information including temperature information and previously acquired distortion information, thereby processing a work-piece (12) to be processed. Furthermore, a light beam irradiation processing device which is provided with a control unit (17) capable of controlling a light beam oscillation unit (11) and drive units (16a, 16b) so that the light beam (22) can be irradiated onto the position determined on the basis of information including the temperature information acquired by temperature information acquisition units (18, 52, 53) and internally stored distortion information.
Inventors:
TACHIBANA, Shinsuke (())
立花 伸介 (())
SHIMADA, Koji (())
立花 伸介 (())
SHIMADA, Koji (())
Application Number:
JP2011/052151
Publication Date:
August 11, 2011
Filing Date:
February 02, 2011
Export Citation:
Assignee:
SHARP KABUSHIKI KAISHA (22-22, Nagaike-cho Abeno-ku, Osaka-sh, Osaka 22, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町22番22号 Osaka, 〒5458522, JP)
TACHIBANA, Shinsuke (())
立花 伸介 (())
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町22番22号 Osaka, 〒5458522, JP)
TACHIBANA, Shinsuke (())
立花 伸介 (())
International Classes:
B23K26/00; B23K26/42; H01L31/04; B23K101/42
Attorney, Agent or Firm:
Fukami Patent Office, p.c. (Nakanoshima Central Tower, 2-7 Nakanoshima 2-chome, Kita-ku, Osaka-sh, Osaka 05, 〒5300005, JP)
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Claims:
