METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERTING DEVICE

WIPO Patent Application WO/2007/111072

A1

This invention provides a method that can hermetically join two members for constituting an envelope for housing a photoelectric surface without deteriorating properties of the photoelectric surface. A chromium metal film (11a) and a nickel metal film (11b) are stacked in that order on a joined part in an upper frame (2) having a photoelectric surface (7). The lower frame (5) comprises a flat plate-shaped member (4) and a silicon frame member (3). The flat plate-shaped member (4) comprises an electron multiplier part (8) and an anode (9). A chromium metal film (10a) and a nickel metal film (10b) are stacked in that order on the joined part of the frame member. The upper frame and the lower frame are superimposed on top of each other through an indium-containing joining material (12). The system is evacuated to a predetermined degree of vacuum, and, in a vacuum space kept at a temperature at or below the melting point of indium, the upper frame and the lower frame are mutually pressed by a predetermined pressure to form an envelope having a housing space in which a satisfactory level of airtightness is maintained.

KISHITA HITOSHI (JP)
SUGIYAMA HIROYUKI (JP)
KYUSHIMA HIROYUKI (JP)
SHIMOI HIDEKI (JP)
INOUE KEISUKE (JP)

PCT/JP2007/053805

October 04, 2007

February 28, 2007

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HAMAMATSU PHOTONICS KK (JP)
KISHITA HITOSHI (JP)
SUGIYAMA HIROYUKI (JP)
KYUSHIMA HIROYUKI (JP)
SHIMOI HIDEKI (JP)
INOUE KEISUKE (JP)

H01J9/26; H01J9/24

WO2005078760A1	2005-08-25
WO2005078760A1	2005-08-25

JP2001210258A	2001-08-03
JP2000311641A	2000-11-07
JP2003151476A	2003-05-23
JPH10241622A	1998-09-11

See also references of EP 2001037A4

HASEGAWA, Yoshiki et al. (Ginza First Bldg.10-6, Ginza 1-chom, Chuo-ku Tokyo 61, JP)

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