Title:
METHOD FOR MANUFACTURING PIEZOELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/114173
Kind Code:
A1
Abstract:
Provided is a method for manufacturing a piezoelectric device comprising a substrate (4), and a vibrating part supported directly or indirectly by the substrate (4) and having a membrane shape or beam shape arranged to the upper side of the substrate (4), the vibrating part including a piezoelectric layer (6), wherein the method includes a step for forming the vibrating part, and a step for carrying out localized heat treatment of an area that includes at least a portion of the vibrating part, to adjust the resonance frequency of the vibrating part.
Inventors:
HADA TAKUO (JP)
YAMAMOTO KANSHO (JP)
YAMAMOTO KANSHO (JP)
Application Number:
PCT/JP2016/050123
Publication Date:
July 21, 2016
Filing Date:
January 05, 2016
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H01L41/253; B81C1/00; H01L41/09; H01L41/113; H04R17/00; H04R31/00
Foreign References:
| JP2002026007A | 2002-01-25 | |||
| JP2005528010A | 2005-09-15 | |||
| JP2007024862A | 2007-02-01 |
Attorney, Agent or Firm:
Fukami Patent Office, p. c. (JP)
Patent business corporation Fukami patent firm (JP)
Patent business corporation Fukami patent firm (JP)
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