Title:
METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING INK JET HEAD
Document Type and Number:
WIPO Patent Application WO/2017/203995
Kind Code:
A1
Abstract:
This method for manufacturing a piezoelectric actuator (21a) as a piezoelectric element includes: an electrode forming step for forming a lower electrode (24) on a base body (27) that includes at least a support substrate (22); a film forming step for forming a piezoelectric thin film (25) on the lower electrode (24); a patterning step for patterning the piezoelectric thin film (25) by removing a part of the piezoelectric thin film (25); and a polishing pattern for polishing the support substrate (22). The polishing step is executed before the patterning step. In the film forming step, the piezoelectric thin film (25) is formed so that the ratio of the peak intensity of a pyrochlore phase to the sum total of the peak intensities of pyrochlore phases in (100) orientation, (110) orientation, and (111) orientation obtained by 2θ/θ measurement of X-ray diffraction becomes 100 ppm or less.
Inventors:
EGUCHI HIDEYUKI (JP)
Application Number:
PCT/JP2017/017913
Publication Date:
November 30, 2017
Filing Date:
May 11, 2017
Export Citation:
Assignee:
KONICA MINOLTA INC (JP)
International Classes:
H01L41/319; B41J2/14; B41J2/16; H01L41/09; H01L41/337
Domestic Patent References:
| WO2015163070A1 | 2015-10-29 | |||
| WO2014162999A1 | 2014-10-09 |
Foreign References:
| JP2015099864A | 2015-05-28 | |||
| JP2006175599A | 2006-07-06 | |||
| JP2013247216A | 2013-12-09 | |||
| JP2002316417A | 2002-10-29 |
Other References:
See also references of EP 3467890A4
Attorney, Agent or Firm:
SANO PATENT OFFICE (JP)
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