METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT

Title:

METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT

Document Type and Number:

WIPO Patent Application WO/2011/148969

Kind Code:

A1

Abstract:

Disclosed is a method for manufacturing a piezoelectric element, which has: a step wherein a green sheet (A) including a portion to be a fired piezoelectric body later is manufactured using a piezoelectric material; a step wherein, a green sheet (B) is bonded to at least one surface of the green sheet (A), said green sheet (B) having, as an opening, a portion that faces the portion to be the fired piezoelectric body later, then, firing is performed, and a reinforcing plate-attached fired piezoelectric body is obtained, said reinforcing plate being formed by firing the green sheet (B); and a step wherein a film-like electrode is formed on the portion formed by firing the green sheet (A), said portion being a part of the reinforcing plate-attached fired piezoelectric body. With the method for manufacturing the piezoelectric element, the piezoelectric element provided with the thin fired piezoelectric body having a high planarity can be obtained.

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Inventors:

OHNISHI, Takao (2-56, Suda-cho, Mizuho-ku, Nagoya-sh, Aichi 30, 〒4678530, JP)
大西　孝生 (〒30 愛知県名古屋市瑞穂区須田町２番５６号　日本碍子株式会社内 Aichi, 〒4678530, JP)
SHIMIZU, Hideki (2-56, Suda-cho, Mizuho-ku, Nagoya-sh, Aichi 30, 〒4678530, JP)

Application Number:

JP2011/061962

Publication Date:

December 01, 2011

Filing Date:

May 25, 2011

Export Citation:

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Assignee:

NGK INSULATORS, LTD. (2-56, Suda-cho Mizuho-ku, Nagoya-sh, Aichi 30, 〒4678530, JP)
日本碍子株式会社 (〒30 愛知県名古屋市瑞穂区須田町２番５６号 Aichi, 〒4678530, JP)
OHNISHI, Takao (2-56, Suda-cho, Mizuho-ku, Nagoya-sh, Aichi 30, 〒4678530, JP)
大西　孝生 (〒30 愛知県名古屋市瑞穂区須田町２番５６号　日本碍子株式会社内 Aichi, 〒4678530, JP)

International Classes:

H01L41/22; C04B35/622; H01L41/09; H01L41/187; H01L41/24

Attorney, Agent or Firm:

WATANABE, Kazuhira (3rd Fl, No.8 Kikuboshi Tower Building 20-18, Asakusabashi 3-chome, Taito-k, Tokyo 53, 〒1110053, JP)

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Claims:

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