Title:
METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT
Document Type and Number:
WIPO Patent Application WO/2018/159772
Kind Code:
A1
Abstract:
Provided is a method of manufacturing a piezoelectric element in which, at a time when the piezoelectric element is manufactured, a piezoelectric material is prevented from being exposed to a temperature higher than a Curie temperature thereof to be depolarized, to thereby significantly decrease piezoelectric properties. The method of manufacturing a piezoelectric element includes a first step of arranging a plurality of electrodes on a piezoelectric material, electrically short-circuiting two or more electrodes of the plurality of electrodes, and subjecting the piezoelectric material to heat treatment, and a second step of, after the first step, electrically opening the short circuit of the two or more electrodes at a time when a temperature of the piezoelectric material decreases to less than a temperature of the piezoelectric material at a time of the heat treatment.
Inventors:
UEBAYASHI AKIRA (JP)
FURUTA TATSUO (JP)
OSHIMA KANAKO (JP)
WATANABE TAKAYUKI (JP)
HAYASHI JUMPEI (JP)
FUJITA SATOSHI (JP)
IITSUKA YUKI (JP)
FURUTA TATSUO (JP)
OSHIMA KANAKO (JP)
WATANABE TAKAYUKI (JP)
HAYASHI JUMPEI (JP)
FUJITA SATOSHI (JP)
IITSUKA YUKI (JP)
Application Number:
PCT/JP2018/007851
Publication Date:
September 07, 2018
Filing Date:
March 01, 2018
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
H01L41/253
Foreign References:
| JPS5785274A | 1982-05-27 | |||
| JPH11322420A | 1999-11-24 |
Other References:
RAO P V B ET AL: "Electrical properties of K0.5Bi0.5TiO3", JOURNAL OF ALLOYS AND COMPOUNDS, ELSEVIER SEQUOIA, LAUSANNE, CH, vol. 467, no. 1-2, 7 January 2009 (2009-01-07), pages 293 - 298, XP025716582, ISSN: 0925-8388, [retrieved on 20071126], DOI: 10.1016/J.JALLCOM.2007.11.089
Attorney, Agent or Firm:
OKABE Yuzuru et al. (JP)
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