Title:
METHOD FOR MANUFACTURING PIEZOELECTRIC FILM, METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT, AND METHOD FOR MANUFACTURING PIEZOELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/210182
Kind Code:
A1
Abstract:
This method for manufacturing a piezoelectric film includes a piezoelectric film formation step for forming a piezoelectric film, in which at least two types of crystal films are layered onto an amorphous film. The piezoelectric film formation step includes: a first crystal film formation step in which a piezoelectric material is sputtered onto the amorphous film in a gas atmosphere containing argon to form a first crystal film that includes the piezoelectric material as a principal constituent and that includes argon; and a second crystal film formation step in which the piezoelectric material is sputtered onto the first crystal film in a gas atmosphere containing krypton to form a second crystal film that includes the piezoelectric material as a principal constituent and includes krypton.
Inventors:
ISHIKAWA TAKETO (JP)
TSUBURAOKA GAKU (JP)
WATANABE MASAHIKO (JP)
AOKI YUZUKI (JP)
NAKAMURA DAISUKE (JP)
MACHINAGA HIRONOBU (JP)
TSUBURAOKA GAKU (JP)
WATANABE MASAHIKO (JP)
AOKI YUZUKI (JP)
NAKAMURA DAISUKE (JP)
MACHINAGA HIRONOBU (JP)
Application Number:
PCT/JP2022/013613
Publication Date:
October 06, 2022
Filing Date:
March 23, 2022
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
International Classes:
H01L41/047; C23C14/08; C23C14/34; H01L41/187; H01L41/29; H01L41/316
Domestic Patent References:
| WO2004101842A1 | 2004-11-25 | |||
| WO2020067330A1 | 2020-04-02 | |||
| WO2020049880A1 | 2020-03-12 | |||
| WO2020066930A1 | 2020-04-02 |
Foreign References:
| JP2005351664A | 2005-12-22 | |||
| JP2020088281A | 2020-06-04 | |||
| JP2013004707A | 2013-01-07 |
Other References:
YING MINJU, SAEEDI AHMAD M. A., YUAN MIAOMIAO, ZHANG XIA, LIAO BIN, ZHANG XU, MEI ZENGXIA, DU XIAOLONG, HEALD STEVE M., FOX A. MAR: "Extremely large d 0 magnetism in krypton implanted polar ZnO films", JOURNAL OF MATERIALS CHEMISTRY C, ROYAL SOCIETY OF CHEMISTRY, GB, vol. 7, no. 5, 31 January 2019 (2019-01-31), GB , pages 1138 - 1145, XP055972965, ISSN: 2050-7526, DOI: 10.1039/C8TC05929B
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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