Title:
METHOD FOR MANUFACTURING A POLISHING RETAINER RING AND RETAINER RING MANUFACTURED THEREBY
Document Type and Number:
WIPO Patent Application WO/2010/120128
Kind Code:
A2
Abstract:
The present invention relates to a method for manufacturing a polishing retainer ring and a retainer ring manufactured thereby to omit the work of forming slits by attaching a polishing element divided into individual sections, thereby simplifying the work process. The method for manufacturing a polishing retainer ring for polishing a semiconductor element according to the present invention comprises: a first step of smoothly machining a top surface of a ring-shaped parent material; a second step of preparing a plurality of polishing element units by machining a polishing element to be identical with the top shape of the parent material; and a third step of adhering the prepared polishing element unit onto the top surface of the parent material, wherein the respective polishing element units are adhered to be apart from each other at a uniform interval. A retainer ring for polishing a semiconductor element may be manufactured by the method for manufacturing a polishing retainer ring as above, wherein the polishing retainer ring is formed of a polishing element adhered to the top of the parent material and the polishing element is characterized in that a plurality of polishing element units are adhered at a uniform interval to form grooves.
Inventors:
HWANG, Jung Ho (#NA-101 Jeongilvilla 68-1 Yangjae-dong Seocho-gu, Seoul 137-130, 137-130, KR)
Application Number:
KR2010/002339
Publication Date:
October 21, 2010
Filing Date:
April 15, 2010
Export Citation:
Assignee:
IS TECHNO.CO., LTD (366-64 Chuja-ri Opo-eup Gwangju-si, Gyeonggi-do 464-893, 464-893, KR)
(주)아이에스테크노 (경기도 광주시 오포읍 추자리 366-64, 464-893 Gyeonggi-do, 464-893, KR)
(주)아이에스테크노 (경기도 광주시 오포읍 추자리 366-64, 464-893 Gyeonggi-do, 464-893, KR)
International Classes:
B24B37/00; B24D7/06; H01L21/304
Attorney, Agent or Firm:
YOON, Yeopyo (WELL International, 5 floor Pungwon building,52-8 Nonhyeon-dong, Gangnam-gu, Seoul 135-010, 135-010, KR)
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