METHOD FOR MANUFACTURING A RADIATION DETECTOR

WIPO Patent Application WO/2012/004908

A1

In the disclosed method for manufacturing a radiation detector, even if chlorine stops being supplied in the middle of a first process in which a detection layer comprising a polycrystalline film or a polycrystalline layered film is formed by deposition or sublimation, an additional source (a chlorine-containing gas such as hydrogen chloride) separate from a source S is supplied at the beginning of or in the middle of the first step. This makes it possible to dope the detection layer with chlorine uniformly in the thickness direction from the beginning of the film-forming process to the end thereof, said detection layer being a CdTe (cadmium telluride), ZnTe (zinc telluride), or CdZnTe (cadmium zinc telluride) polycrystal or polycrystalline layered film. As a result, crystal grains can be made uniform and detection characteristics can be made uniform.

TOKUDA SATOSHI (JP)
TANABE KOICHI (JP)
YOSHIMUTA TOSHINORI (JP)
KISHIHARA HIROYUKI (JP)
KAINO MASATOMO (JP)
YOSHIMATSU AKINA (JP)
SATO TOSHIYUKI (JP)
KUWABARA SHOJI (JP)

PCT/JP2011/000733

January 12, 2012

February 09, 2011

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SHIMADZU CORP (JP)
INST NAT COLLEGES TECH JAPAN (JP)
TOKUDA SATOSHI (JP)
TANABE KOICHI (JP)
YOSHIMUTA TOSHINORI (JP)
KISHIHARA HIROYUKI (JP)
KAINO MASATOMO (JP)
YOSHIMATSU AKINA (JP)
SATO TOSHIYUKI (JP)
KUWABARA SHOJI (JP)

H01L31/09; G01T1/24; H01L27/14; H01L27/146

WO2009101670A1

2009-08-20

JP2004172377A

2004-06-17

SUGITANI, Tsutomu (JP)
Tsutomu Sugitani (JP)

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