METHOD FOR MANUFACTURING SILICON CARBIDE SINTERED COMPACT JIG AND SILICON CARBIDE SINTERED COMPACT JIG MANUFACTURED BY THE METHOD

Title:

METHOD FOR MANUFACTURING SILICON CARBIDE SINTERED COMPACT JIG AND SILICON CARBIDE SINTERED COMPACT JIG MANUFACTURED BY THE METHOD

Document Type and Number:

WIPO Patent Application WO/2003/076363

Kind Code:

A1

Abstract:

A method for manufacturing a silicon carbide sintered compact jig, characterized in that it has (a) a step of dispersing or dissolving a SiC powder or an organic material as a C source into a solvent, to prepare a mixed powder slurry; (b) a step of pouring the mixed powder slurry into a mold and drying it, to form a green compact, (c) a step of subjecting the green compact to calcination at 1500 to 2000&ring C under vacuum or in an inert gas atmosphere, to provide a calcinated compact, (d) a step of pre-forming the calcinated compact to prepare a pre-formed article, (e) a step of impregnating the pre-formed article with molten metallic Si by utilizing the capillary action, to thereby react the free carbon in the pre-formed article with the Si absorbed in the pre-formed article, to form a silicon carbide sintered compact, and (f) subjecting the silicon carbide sintered compact to precise working, to manufacture the silicon carbide sintered compact jig; and a silicon carbide sintered compact jig manufactured by the method. The method allows the saving of the time required for manufacturing a silicon carbide sintered compact jig.

Inventors:

MOTOYAMA TSUYOSHI (JP)
TAGUCHI JIN-ICHI (JP)
ODAKA FUMIO (JP)
SHINOGAYA TOSHIKAZU (JP)

Application Number:

PCT/JP2003/002720

Publication Date:

September 18, 2003

Filing Date:

March 07, 2003

Export Citation:

Click for automatic bibliography generation Help

Assignee:

BRIDGESTONE CORP (JP)
MOTOYAMA TSUYOSHI (JP)
TAGUCHI JIN-ICHI (JP)
ODAKA FUMIO (JP)
SHINOGAYA TOSHIKAZU (JP)

International Classes:

C04B35/573; H01L21/673; (IPC1-7): C04B35/56; H01L21/205

Foreign References:

JP2000349137A	2000-12-15
US6387834B1	2002-05-14
EP0357491A2	1990-03-07
EP0885859A2	1998-12-23
JP2001257056A	2001-09-21

Other References: