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Title:
METHOD FOR MANUFACTURING SILICON SUBSTRATE HAVING GLASS EMBEDDED THEREIN
Document Type and Number:
WIPO Patent Application WO/2011/118788
Kind Code:
A1
Abstract:
Disclosed is a method for manufacturing a silicon substrate having a glass embedded therein, wherein a step generated on the polishing surface due to the difference between the polishing rate of silicon and that of the glass is suppressed. The method has: a first step wherein a protruding section having a first metal film at the top portion is formed on the first main surface of the silicon substrate having the first and the second main surfaces that face each other; a second step wherein the third main surface of the glass substrate having the third and the fourth main surfaces that face each other is overlaid on the first main surface of the silicon substrate; a third step wherein the glass substrate is softened by applying heat, and a part of the glass substrate is embedded in the periphery of the protruding section of the silicon substrate; a fourth step wherein the glass substrate is cooled; and a fifth step wherein the fourth main surface of the glass substrate is uniformly ground off until the first metal film is exposed from the fourth main surface of the glass substrate. In the fifth step, at least mechanical polishing with chemical effects using an abrasive or a polishing liquid is performed.

Inventors:
OKUMURA, Shin (1048, Oaza-Kadoma, Kadoma-sh, Osaka 86, 〒5718686, JP)
奥村 真 (〒86 大阪府門真市大字門真1048番地 パナソニック電工株式会社内 Osaka, 〒5718686, JP)
NAKATANI, Tomohiro (1048, Oaza-Kadoma, Kadoma-sh, Osaka 86, 〒5718686, JP)
中谷 友洋 (〒86 大阪府門真市大字門真1048番地 パナソニック電工株式会社内 Osaka, 〒5718686, JP)
Application Number:
JP2011/057403
Publication Date:
September 29, 2011
Filing Date:
March 25, 2011
Export Citation:
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Assignee:
PANASONIC ELECTRIC WORKS CO., LTD. (1048, Oaza-Kadoma Kadoma-sh, Osaka 86, 〒5718686, JP)
パナソニック電工株式会社 (〒86 大阪府門真市大字門真1048番地 Osaka, 〒5718686, JP)
OKUMURA, Shin (1048, Oaza-Kadoma, Kadoma-sh, Osaka 86, 〒5718686, JP)
奥村 真 (〒86 大阪府門真市大字門真1048番地 パナソニック電工株式会社内 Osaka, 〒5718686, JP)
NAKATANI, Tomohiro (1048, Oaza-Kadoma, Kadoma-sh, Osaka 86, 〒5718686, JP)
International Classes:
H01L23/15; B24B37/04; G01P15/08; G01P15/125; H01L23/14; H01L29/84
Foreign References:
JP2002043468A2002-02-08
JP2006047279A2006-02-16
Attorney, Agent or Firm:
TANAKA, Mitsuo et al. (AOYAMA & PARTNERS, IMP Building 3-7, Shiromi 1-chome, Chuo-ku, Osaka-sh, Osaka 01, 〒5400001, JP)
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Claims: