Title:
METHOD OF MANUFACTURING SINGLE THIN FILM FOR NONDESTRUCTIVE SENSOR
Document Type and Number:
WIPO Patent Application WO/2010/005167
Kind Code:
A3
Abstract:
The present invention relates to a method of manufacturing a single thin film for a nondestructive sensor. The method is able to prevent the thickness of the deposited plating on the main pattern from being uneven in a wafer substrate by using an electroplating method when manufacturing the single thin film for a nondestructive sensor. The method is capable of stabilizing the thickness of the thin film on the main pattern and improving the uniformity of the thin film by depositing the main pattern and a dummy pattern at the same time while keeping a uniform interval between the main and dummy patterns so that the yield rate of a wafer may be improved. In addition to a main material, various additives can be used in the method when manufacturing a magnetic element in order that the characteristics and grain size of the element may be controlled. The method can save the material consumption and shorten the processing time by securing the stable manufacturing processes through the production of a mask for a dummy pattern. The method enables the control over the plating shape through the production of a mask for an aligner, and allows the application of actual manufacturing technique after applying various plating thicknesses to the patterns and confirming the uniformity for each thickness. The method enables the stabilization of current pattern-plating and the increase in the yield rate by using the electroplating method when forming the dummy patterns so that the manufacturing cost may be reduced.
Inventors:
KIM JONG HO (KR)
NA YONG BAE (KR)
LEE JAE HOON (KR)
SHIN DONG MOON (KR)
NA YONG BAE (KR)
LEE JAE HOON (KR)
SHIN DONG MOON (KR)
Application Number:
PCT/KR2009/002287
Publication Date:
March 04, 2010
Filing Date:
April 30, 2009
Export Citation:
Assignee:
NOBA MAGNETICS CO LTD COM (KR)
KIM JONG HO (KR)
NA YONG BAE (KR)
LEE JAE HOON (KR)
SHIN DONG MOON (KR)
KIM JONG HO (KR)
NA YONG BAE (KR)
LEE JAE HOON (KR)
SHIN DONG MOON (KR)
International Classes:
H01L21/203
Foreign References:
| KR20060009387A | 2006-01-31 | |||
| KR20010093678A | 2001-10-29 | |||
| KR100584186B1 | 2006-05-29 |
Attorney, Agent or Firm:
KIM, Jea Wook (642-6 Yeoksam-dong, Gangnam-gu, Seoul 135-717, KR)
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