Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
METHOD FOR MANUFACTURING SNS-TYPE JOSEPHSON JUNCTION DEVICE AND APPARATUS FOR MANUFACTURING SNS-TYPE JOSEPHSON JUNCTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/029714
Kind Code:
A1
Abstract:
The present invention provides a method for manufacturing an SNS-type Josephson junction device by radiating a beam on a laminate provided with a pair of superconducting films and with an insulating film disposed between the pair of superconducting films, the method being characterized in that the insulating film is formed of an insulating oxide of niobium, vanadium, titanium, or tantalum and in that the method is provided with: a beam radiation step for radiating the beam, composed of nonmetal ions, X-rays, or an electron beam, on the laminate from outside one of the superconducting films to convert part of the insulating oxide in the insulating film to an electroconductive oxide; and a beam adjustment step for measuring an electrical current or modulation voltage between the pair of superconducting films and adjusting the radiation of the beam on the basis of a measurement value resulting from the measurement.

Inventors:
ZHANG YANPING (JP)
Application Number:
PCT/JP2015/073164
Publication Date:
February 23, 2017
Filing Date:
August 18, 2015
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
International Classes:
H01L39/22; H01L39/24
Domestic Patent References:
WO2014122833A12014-08-14
WO2015146208A12015-10-01
Foreign References:
JP2003031862A2003-01-31
JP2002076456A2002-03-15
JPH01125002A1989-05-17
JPH0384973A1991-04-10
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Download PDF: