Title:
METHOD FOR MANUFACTURING SOLAR BATTERY CELL
Document Type and Number:
WIPO Patent Application WO/2010/064303
Kind Code:
A1
Abstract:
A method for manufacturing a solar battery cell includes a first step of forming a passivation film, which is composed of a silicon nitride film, on one surface of a first conductivity type polycrystalline silicon substrate by plasma CVD method; a second step of forming a pn junction section by diffusing a second conductivity type element on the other surface of the polycrystalline silicon substrate by thermal diffusion and forming a diffusion layer; a third step of forming a reflection preventing film, which is composed of a silicon nitride film, on the diffusion layer by plasma CVD method; a fourth step of arranging a first electrode paste on the other surface of the polycrystalline silicon substrate; and a fifth step of arranging a second electrode paste on the passivation film; and a sixth step of forming an electrode by baking the first electrode paste and the second electrode paste.
Inventors:
NISHIMOTO YOICHIRO (JP)
Application Number:
PCT/JP2008/071901
Publication Date:
June 10, 2010
Filing Date:
December 02, 2008
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
NISHIMOTO YOICHIRO (JP)
NISHIMOTO YOICHIRO (JP)
International Classes:
H01L31/04
Foreign References:
| JP2007234641A | 2007-09-13 | |||
| JP2002270869A | 2002-09-20 | |||
| JP2008512858A | 2008-04-24 | |||
| JP2005005280A | 2005-01-06 | |||
| JPH0945945A | 1997-02-14 | |||
| JP2002093722A | 2002-03-29 |
Other References:
O. SCHULTZ ET AL.: "THERMAL OXIDATION PROCESSES FOR HIGH-EFFICIENCY MULTICRYSTALLINE SILICON SOLAR CELLS", PROCEEDINGS OF THE 19TH EU-PVSC, PARIS, FRANCE 7-11 JUNE 2004, 7 June 2004 (2004-06-07)
M. HOFMAN ET AL.: "SILICON NITRIDE-SILICON OXIDE STACKS FOR SOLAR CELL REAR SIDE PASSIVATION", PROCEEDINGS OF THE 19TH EU-PVSC, PARIS, FRANCE 7-11 JUNE 2004, 7 June 2004 (2004-06-07)
M. MCCANN ET AL.: "ANGLED BURIED CONTACTS: A FRONT CONTACTING SCHEME FOR HIGH EFFICIENCY CELLS WITH LOW SHADING LOSSES", PROCEEDINGS OF THE 20TH EUROPEAN PHOTOVOLTAIC SOLAR ENERGY CONFERENCE, BARCELONA, SPAIN 6-10 JUNE 2005, pages 737
See also references of EP 2365534A1
M. HOFMAN ET AL.: "SILICON NITRIDE-SILICON OXIDE STACKS FOR SOLAR CELL REAR SIDE PASSIVATION", PROCEEDINGS OF THE 19TH EU-PVSC, PARIS, FRANCE 7-11 JUNE 2004, 7 June 2004 (2004-06-07)
M. MCCANN ET AL.: "ANGLED BURIED CONTACTS: A FRONT CONTACTING SCHEME FOR HIGH EFFICIENCY CELLS WITH LOW SHADING LOSSES", PROCEEDINGS OF THE 20TH EUROPEAN PHOTOVOLTAIC SOLAR ENERGY CONFERENCE, BARCELONA, SPAIN 6-10 JUNE 2005, pages 737
See also references of EP 2365534A1
Attorney, Agent or Firm:
SAKAI, HIROAKI (JP)
Hiroaki Sakai (JP)
Hiroaki Sakai (JP)
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