Title:
METHOD FOR MANUFACTURING SOLAR CELL, AND SOLAR CELL
Document Type and Number:
WIPO Patent Application WO/2010/084758
Kind Code:
A1
Abstract:
Disclosed is a method for manufacturing a solar cell which comprises a transparent conductive film (54) that is formed on a transparent substrate (6, 51). In the method, a target (7), which is composed of a material containing a main constituent material ZnO and a substance containing Al or Ga, is prepared; a first layer (54a) constituting the transparent conductive film (54) is formed by applying a sputtering voltage to the target (7) in a first atmosphere containing a process gas; a second layer (54b) constituting the transparent conductive film (54) is formed on the first layer (54a) by applying a sputtering voltage to the target (7) in a second atmosphere that contains more oxygen gas than the first atmosphere; and a recessed and projected pattern is formed by etching the transparent conductive film (54).
Inventors:
TAKAHASHI, Hirohisa (ULVAC Inc., 523, Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
高橋明久 (〒26 千葉県山武市横田５２３ 株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
ISHIBASHI, Satoru (ULVAC Inc., 523, Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
石橋暁 (〒26 千葉県山武市横田５２３ 株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
USAMI, Tatsumi (ULVAC Inc., 523, Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
高橋明久 (〒26 千葉県山武市横田５２３ 株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
ISHIBASHI, Satoru (ULVAC Inc., 523, Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
石橋暁 (〒26 千葉県山武市横田５２３ 株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
USAMI, Tatsumi (ULVAC Inc., 523, Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
Application Number:
JP2010/000342
Publication Date:
July 29, 2010
Filing Date:
January 21, 2010
Export Citation:
Assignee:
ULVAC, Inc. (2500, Hagisono Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００ Kanagawa, 〒2538543, JP)
TAKAHASHI, Hirohisa (ULVAC Inc., 523, Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
高橋明久 (〒26 千葉県山武市横田５２３ 株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
ISHIBASHI, Satoru (ULVAC Inc., 523, Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
石橋暁 (〒26 千葉県山武市横田５２３ 株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００ Kanagawa, 〒2538543, JP)
TAKAHASHI, Hirohisa (ULVAC Inc., 523, Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
高橋明久 (〒26 千葉県山武市横田５２３ 株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
ISHIBASHI, Satoru (ULVAC Inc., 523, Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
石橋暁 (〒26 千葉県山武市横田５２３ 株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
International Classes:
H01L31/04
Attorney, Agent or Firm:
SHIGA, Masatake et al. (1-9-2, Marunouchi Chiyoda-k, Tokyo 20, 〒1006620, JP)
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