Title:
METHOD FOR MANUFACTURING SOLAR CELL, AND SOLAR CELL
Document Type and Number:
WIPO Patent Application WO/2016/129372
Kind Code:
A1
Abstract:
Obtained is a method for manufacturing a solar cell having a long carrier life, wherein mixing of an impurity into the back surface is suppressed when impurity diffusion is carried out by a heat treatment after the formation of a film of a solid-phase diffusion source. This method for manufacturing a solar cell comprises: a step for forming a film of a solid-phase diffusion source on a first main surface of a semiconductor substrate of a first conductivity type, said semiconductor substrate having the first main surface and a second main surface; and a heat treatment step for forming a diffusion layer of a second conductivity type by diffusing an impurity of the second conductivity type from the solid-phase diffusion source by means of a heat treatment. The heat treatment step comprises: a first step wherein the semiconductor substrate is heated at a first temperature T1 for a time period of t0, while supplying oxygen thereto; a second step wherein the supply of oxygen is stopped and the semiconductor substrate is heated at a second temperature T2 for a time period of t1, while supplying an inert gas thereto, so that an impurity is diffused thereinto; and a third step wherein the semiconductor substrate is heated at a third temperature T2 for a time period of t2, while supplying oxygen thereto again. In this connection, the first, second third steps are carried out in a same furnace.
Inventors:
NISHIMURA SHINYA (JP)
NISHIMURA KUNIHIKO (JP)
NIINOBE DAISUKE (JP)
NISHIMURA KUNIHIKO (JP)
NIINOBE DAISUKE (JP)
Application Number:
PCT/JP2016/052013
Publication Date:
August 18, 2016
Filing Date:
January 25, 2016
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
H01L31/0216; H01L21/22; H01L21/225; H01L31/068; H01L31/18
Domestic Patent References:
| WO2014123060A1 | 2014-08-14 |
Foreign References:
| JP2013145837A | 2013-07-25 | |||
| JPH04369216A | 1992-12-22 | |||
| JP2002299268A | 2002-10-11 | |||
| JP2012507855A | 2012-03-29 |
Attorney, Agent or Firm:
TAKAMURA, JUN (JP)
Jun Takamura (JP)
Jun Takamura (JP)
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