Title:
METHOD FOR MANUFACTURING SUBSTRATE, METHOD FOR MANUFACTURING SOLAR CELL, SUBSTRATE, AND SOLAR CELL
Document Type and Number:
WIPO Patent Application WO/2017/209251
Kind Code:
A1
Abstract:
A method for manufacturing a substrate (11), comprising: a step for implanting an atom species (2) into a semiconductor single crystal (1) including at least one atom selected from the group consisting of germanium, gallium, and indium; a step for forming a support substrate (3) on the surface (1a) of the semiconductor single crystal (1) after implantation of the atomic species (2), the support substrate (3) being formed by at least one method selected from the group consisting of deposition, CVD, plating, printing, sputtering, the sol-gel method, and thermal spraying; and a step for performing peeling with the support substrate (3) formed on a part (10) of the semiconductor crystal (1).
Inventors:
TAKAMOTO TATSUYA
Application Number:
PCT/JP2017/020471
Publication Date:
December 07, 2017
Filing Date:
June 01, 2017
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
H01L21/02; H01L21/20; H01L21/265; H01L31/18
Foreign References:
| JP2007510298A | 2007-04-19 | |||
| JPH09181011A | 1997-07-11 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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