Title:
METHOD FOR MANUFACTURING A SUPERHYDROPHOBIC FILM SHEET
Document Type and Number:
WIPO Patent Application WO/2013/015562
Kind Code:
A3
Abstract:
The present invention relates to a method for manufacturing a superhydrophobic film sheet, and more particularly, to a method for manufacturing a superhydrophobic film sheet by generating a structure having projections for providing a superhydrophobic effect such as that of a real lotus leaf by controlling the number of times, and the amount of time, a photoresist is baked and providing a superhydrophobic surface by coating a polydimethylsiloxane (PDMS) with a transparent material having hydrophobic qualities. The method comprises the steps of: (a) cleaning a surface of a silicon wafer; (b) coating the top of the silicon wafer with a photoresist (AZ4620) using a spin coater, and soft-baking the silicon wafer in an oven; (c) exposing a structure manufactured in step (b) using a mask aligner; (d) developing using a photoresist developing solution(AZ400K); (e) performing PDMS molding on a top of a structure manufactured in step (d); and (f) removing the photoresist (AZ4620) using acetone, thereby completing a superhydrophobic film sheet having projections on an end thereof.
Inventors:
LEE DONG WEON (KR)
GO GUN (KR)
PARK SEUNG HWAN (KR)
LEE SA MYUNG (KR)
PARK JONG SUNG (KR)
GO GUN (KR)
PARK SEUNG HWAN (KR)
LEE SA MYUNG (KR)
PARK JONG SUNG (KR)
Application Number:
PCT/KR2012/005774
Publication Date:
March 21, 2013
Filing Date:
July 19, 2012
Export Citation:
Assignee:
UNIV NAT CHONNAM IND FOUND (KR)
LEE DONG WEON (KR)
GO GUN (KR)
PARK SEUNG HWAN (KR)
LEE SA MYUNG (KR)
PARK JONG SUNG (KR)
LEE DONG WEON (KR)
GO GUN (KR)
PARK SEUNG HWAN (KR)
LEE SA MYUNG (KR)
PARK JONG SUNG (KR)
International Classes:
H01L21/027
Foreign References:
| JP2005262522A | 2005-09-29 | |||
| KR20100008579A | 2010-01-26 | |||
| KR20100037717A | 2010-04-12 |
Other References:
JUNG, SUN NYEONG ET AL., FABRICATION OF WATER STRIDER ROBOT USING SUPER HYDROPHOBIC SURFACES WITH MICRO PROTRUSIONS, February 2008 (2008-02-01), PUSAN UNIVERSITY GRADUATE SCHOOL, XP008173353
Attorney, Agent or Firm:
LEE, Un Cheol (11F. 123, Teheran-ro Gangnam-gu, Seoul 135-748, KR)
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Claims: