METHOD FOR MANUFACTURING SURFACE ACOUSTIC WAVE DEVICE AND INSPECTING INSTRUMENT

WIPO Patent Application WO/2002/060054

A1

An instrument for inspecting a surface acoustic wave device used as a high frequency filter in the field of mobile communication. The instrument comprises an electron gun (1) for generating and projecting an electron beam as primary electrons a condenser lens (2) for focusing the electron beam on a substrate (9) a secondary electron detector (4) for detecting secondary electrons emitted from the substrate (9) irradiated with the primary electrons a substrate holder (5) for holding the substrate (9), and a conductive grounding mechanism (6) earthed and capable of contacting with a metal film (7). The grounding mechanism (6) includes a conductive contact portion (12) capable of contacting with the metal film (7), an arm portion (47) with the contact portion (12) on its one end, and a rotary shaft (48) mounted on the end of the arm portion (47) and opposed to the contact portion (12). The substrate (9) has a two-layer structure including a circular piezoelectric substrate (8) made of lithium tantalate (LiTaO3) and the metal film (7) formed of aluminum (Al) on the piezoelectric substrate (8).

JPS58119222	[Title of the device] The mask pattern for elastic-surfaces wave vibrator formation
JPH0514099	MANUFACTURE OF SURFACE ACOUSTIC WAVE DEVICE
JP2017049237	SYSTEMS AND METHODS FOR QUARTZ WAFER BONDING

TAKAGI TOSHIYUKI (JP)

PCT/JP2001/008639

August 01, 2002

October 01, 2001

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TOSHIBA KK (JP)
TAKAGI TOSHIYUKI (JP)

H03H3/08; (IPC1-7): H03H3/08; H01L21/027

JPH11338147A	1999-12-10
JPH11298284A	1999-10-29
US5512746A	1996-04-30
JP2000173525A	2000-06-23
US5106471A	1992-04-21

See also references of EP 1363395A4

Miyoshi, Hidekazu (2-8 Toranomon 1-chome, Minato-k, Tokyo 01, JP)

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