Title:
METHOD FOR MANUFACTURING SURFACE ACOUSTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2003/005577
Kind Code:
A1
Abstract:
A method for manufacturing a surface acoustic wave device comprising a first conductive pattern and a second conductive pattern having different thicknesses on the same piezoelectric substrate. The surface acoustic wave device having a plurality of electrode films with different thicknesses on the same piezoelectric substrate is manufactured with excellent accuracy by combining a plurality of steps of forming metal films and an etching step.
Inventors:
Yamashita, Kiyoharu (2-13-8, Kamikamida Neyagawa-shi, Osaka, 572-0052, JP)
Ikeda, Kazuo (3-17-18-506, Makinosaka Hirakata-shi, Osaka, 573-1146, JP)
Seki, Shunichi (3-4-1-402, Kema Amagasaki-shi, Hyogo, 661-0982, JP)
Furukawa, Mitsuhiro (9-11-4, Kasugadai Nishi-k, Kobe-shi Hyogo, 651-2276, JP)
Ikeda, Kazuo (3-17-18-506, Makinosaka Hirakata-shi, Osaka, 573-1146, JP)
Seki, Shunichi (3-4-1-402, Kema Amagasaki-shi, Hyogo, 661-0982, JP)
Furukawa, Mitsuhiro (9-11-4, Kasugadai Nishi-k, Kobe-shi Hyogo, 651-2276, JP)
Application Number:
PCT/JP2002/006550
Publication Date:
January 16, 2003
Filing Date:
July 01, 2002
Export Citation:
Assignee:
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1006, Oaza Kadoma Kadoma-shi, Osaka, 571-8501, JP)
Yamashita, Kiyoharu (2-13-8, Kamikamida Neyagawa-shi, Osaka, 572-0052, JP)
Ikeda, Kazuo (3-17-18-506, Makinosaka Hirakata-shi, Osaka, 573-1146, JP)
Seki, Shunichi (3-4-1-402, Kema Amagasaki-shi, Hyogo, 661-0982, JP)
Furukawa, Mitsuhiro (9-11-4, Kasugadai Nishi-k, Kobe-shi Hyogo, 651-2276, JP)
Yamashita, Kiyoharu (2-13-8, Kamikamida Neyagawa-shi, Osaka, 572-0052, JP)
Ikeda, Kazuo (3-17-18-506, Makinosaka Hirakata-shi, Osaka, 573-1146, JP)
Seki, Shunichi (3-4-1-402, Kema Amagasaki-shi, Hyogo, 661-0982, JP)
Furukawa, Mitsuhiro (9-11-4, Kasugadai Nishi-k, Kobe-shi Hyogo, 651-2276, JP)
International Classes:
H03H3/08; H03H9/145; (IPC1-7): H03H3/08; H03H9/145; G01B21/08
Attorney, Agent or Firm:
Iwahashi, Fumio c/o Matsushita Electric Industrial Co. Ltd. (1006, Oaza Kadom, Kadoma-shi Osaka, 571-8501, JP)
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