Title:
METHOD OF MANUFACTURING A TEMPLATE MATCHING TEMPLATE, AS WELL AS A DEVICE FOR MANUFACTURING A TEMPLATE
Document Type and Number:
WIPO Patent Application WO/2010/137267
Kind Code:
A1
Abstract:
Provided is a method of manufacturing a template matching template, as well as a device for manufacturing a template, by both of which high matching accuracy can be stably ensured without being affected by factors such as process variations.
As an embodiment of the above, a method of manufacturing a template matching template, as well as a relevant deice, is proposed by both of which a template memorized in advance and an image acquired by a microscope are compared, thereby identifying a desired position, and by which a plurality of images at the identified location are acquired by template matching, and the aforementioned plurality of images are added and averaged, thereby manufacturing a new template.
Inventors:
YAMADA YUKARI (JP)
YANG KYOUNGMO (JP)
KAKUTA JUNICHI (JP)
YANG KYOUNGMO (JP)
KAKUTA JUNICHI (JP)
Application Number:
PCT/JP2010/003412
Publication Date:
December 02, 2010
Filing Date:
May 21, 2010
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
YAMADA YUKARI (JP)
YANG KYOUNGMO (JP)
KAKUTA JUNICHI (JP)
YAMADA YUKARI (JP)
YANG KYOUNGMO (JP)
KAKUTA JUNICHI (JP)
International Classes:
G01B15/04; G01B11/24; G01N21/956; G01N23/225; G06T7/00; G06V10/772; H01L21/66
Foreign References:
| JP2005300322A | 2005-10-27 | |||
| JPH0843042A | 1996-02-16 | |||
| JPH1038514A | 1998-02-13 | |||
| JPS5983280A | 1984-05-14 |
Attorney, Agent or Firm:
INOUE, MANABU (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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