Title:
METHOD FOR MANUFACTURING THIN-FILM PHOTOELECTRIC CONVERSION DEVICE
Document Type and Number:
WIPO Patent Application WO/2010/064549
Kind Code:
A1
Abstract:
A method for manufacturing a thin-film photoelectric conversion device comprises: a first step wherein a first electrode layer, a photoelectric conversion layer in which a semiconductor layer of a first conductivity type, a semiconductor layer of a second conductivity type and a semiconductor layer of a third conductivity type are sequentially laminated, and a second electrode layer are sequentially formed on a light-transmitting insulating substrate in such a manner that adjacent thin film photoelectric conversion cells are electrically connected with each other in series; a second step wherein a plurality of thin-film photoelectric conversion cells are divided off by forming a separation groove which ranges from the surface of the second electrode layer to the first electrode layer; and a third step wherein the side wall portion of the separation groove of the photoelectric conversion layer is modified into an insulating layer by oxidizing the side wall portion of the separation groove of the photoelectric conversion layer after the second step.
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Inventors:
TOKIOKA, Hidetada (7-3 Marunouchi 2-chome, Chiyoda-k, Tokyo 10, 〒1008310, JP)
時岡 秀忠 (〒10 東京都千代田区丸の内二丁目７番３号 三菱電機株式会社内 Tokyo, 〒1008310, JP)
YAMARIN, Hiroya (7-3 Marunouchi 2-chome, Chiyoda-k, Tokyo 10, 〒1008310, JP)
時岡 秀忠 (〒10 東京都千代田区丸の内二丁目７番３号 三菱電機株式会社内 Tokyo, 〒1008310, JP)
YAMARIN, Hiroya (7-3 Marunouchi 2-chome, Chiyoda-k, Tokyo 10, 〒1008310, JP)
Application Number:
JP2009/069724
Publication Date:
June 10, 2010
Filing Date:
November 20, 2009
Export Citation:
Assignee:
Mitsubishi Electric Corporation (7-3 Marunouchi 2-chome, Chiyoda-ku Tokyo, 10, 〒1008310, JP)
三菱電機株式会社 (〒10 東京都千代田区丸の内二丁目７番３号 Tokyo, 〒1008310, JP)
TOKIOKA, Hidetada (7-3 Marunouchi 2-chome, Chiyoda-k, Tokyo 10, 〒1008310, JP)
時岡 秀忠 (〒10 東京都千代田区丸の内二丁目７番３号 三菱電機株式会社内 Tokyo, 〒1008310, JP)
三菱電機株式会社 (〒10 東京都千代田区丸の内二丁目７番３号 Tokyo, 〒1008310, JP)
TOKIOKA, Hidetada (7-3 Marunouchi 2-chome, Chiyoda-k, Tokyo 10, 〒1008310, JP)
時岡 秀忠 (〒10 東京都千代田区丸の内二丁目７番３号 三菱電機株式会社内 Tokyo, 〒1008310, JP)
International Classes:
H01L31/075; H01L27/142
Attorney, Agent or Firm:
SAKAI, Hiroaki (Sakai International Patent Office, Kasumigaseki Building 2-5, Kasumigaseki 3-chome, Chiyoda-k, Tokyo 20, 〒1006020, JP)
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