Title:
METHOD FOR MANUFACTURING THIN-LAYER CAPACITOR, THIN-LAYER CAPACITOR, AND METHOD FOR MANUFACTURING WIRING BOARD WITH BUILT-IN CAPACITOR
Document Type and Number:
WIPO Patent Application WO/2008/075504
Kind Code:
A1
Abstract:
This invention provides a method for efficiently manufacturing a thin-layer
capacitor which is high in reliability of a ceramic dielectric body and has an
excellent adhesive strength between an electrode layer for capacitance formation
and a resin in the incorporation of the capacitor, for example, in a wiring board
by embedding the capacitor with the resin. A laminate (15) having no oxide film,
which hinders wet etching, on its surface, comprising base metal-containing
electrode layers (12a, 12b) and a ceramic dielectric layer (13) held between
the electrode layers is formed. The electrode layers are patterned by wet etching
to form electrode layers (14a, 14b) for capacitance formation, followed by heat
treatment in an oxidizing atmosphere to form an oxide film on the surface of the
electrodes for capacitance formation. The laminate forming step comprises
the step of stacking a conductor green sheet, which contains a metallic powder
and is converted to an electrode layer, and a dielectric ceramic green sheet which
is converted to a ceramic dielectric layer on top of each other to provide an unbaked
laminate, and the step of baking the unbaked laminate.
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Inventors:
KOBAYASHI, Haruki (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 6178555, JP)
小林 玄樹 (〒55 京都府長岡京市東神足１丁目１０番１号 株式会社村田製作所内 Kyoto, 6178555, JP)
KUNIMATSU, Hiroshi (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 6178555, JP)
小林 玄樹 (〒55 京都府長岡京市東神足１丁目１０番１号 株式会社村田製作所内 Kyoto, 6178555, JP)
KUNIMATSU, Hiroshi (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 6178555, JP)
Application Number:
JP2007/071218
Publication Date:
June 26, 2008
Filing Date:
October 31, 2007
Export Citation:
Assignee:
Murata Manufacturing Co., Ltd. (10-1, Higashikotari 1-chome Nagaokakyo-sh, Kyoto 55, 6178555, JP)
株式会社村田製作所 (〒55 京都府長岡京市東神足１丁目１０番１号 Kyoto, 6178555, JP)
KOBAYASHI, Haruki (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 6178555, JP)
小林 玄樹 (〒55 京都府長岡京市東神足１丁目１０番１号 株式会社村田製作所内 Kyoto, 6178555, JP)
株式会社村田製作所 (〒55 京都府長岡京市東神足１丁目１０番１号 Kyoto, 6178555, JP)
KOBAYASHI, Haruki (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 6178555, JP)
小林 玄樹 (〒55 京都府長岡京市東神足１丁目１０番１号 株式会社村田製作所内 Kyoto, 6178555, JP)
International Classes:
H01G4/12; H01G13/00; H05K3/46
Attorney, Agent or Firm:
NISHIZAWA, Hitoshi (5Th Floor, Daido Seimei Minami-kan1-2-11 Edobori, Nishi-k, Osaka-shi Osaka 02, 5500002, JP)
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