Title:
METHOD FOR MANUFACTURING TRANSPARENT CONDUCTIVE FILM
Document Type and Number:
WIPO Patent Application WO/2019/124743
Kind Code:
A1
Abstract:
A method for manufacturing a transparent conductive film according to one embodiment of the present application comprises the steps of: preparing a substrate; and forming a thin film containing a compound represented by chemical formula 1 on the substrate, wherein the thin film formation step is performed by an RF sputtering process at a temperature of 250°C or lower.
Inventors:
SHIN DONGMYUNG (KR)
MOON JONGMIN (KR)
MOON JONGMIN (KR)
Application Number:
PCT/KR2018/013833
Publication Date:
June 27, 2019
Filing Date:
November 13, 2018
Export Citation:
Assignee:
LG CHEMICAL LTD (KR)
International Classes:
C23C14/08; C23C14/34; H01B5/14; H01B13/00
Foreign References:
| US20170213653A1 | 2017-07-27 | |||
| KR20110063769A | 2011-06-14 | |||
| KR20170125784A | 2017-11-15 | |||
| KR20070077130A | 2007-07-25 | |||
| KR20170177885A | 2017-12-22 |
Other References:
LUO ET AL.: "High Carrier Mobility in Transparent Bal-xLaxSn03 Crystals with a Wide Band Gap", APPLIED PHYSICS LETTERS, vol. 100, no. 17, 23 April 2012 (2012-04-23), pages 1 - 5, XP012155757, ISSN: 0003-6951, DOI: 10.1063/1.4709415
See also references of EP 3730669A4
See also references of EP 3730669A4
Attorney, Agent or Firm:
CHUNG, Soon-Sung (KR)
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