Title:
METHOD FOR MANUFACTURING VARIABLE RESISTANCE ELEMENT
Document Type and Number:
WIPO Patent Application WO/2012/105214
Kind Code:
A1
Abstract:
Provided is a method for manufacturing a variable resistance element that can improve the endurance characteristics of nonvolatile storage.
This method for manufacturing a variable resistance element (112) comprises: a step (A) for forming a first electrode material layer (105M) on a substrate (100); a step (B) for forming a first tantalum oxide material layer (106aF); a step (C) for forming a second tantalum oxide material layer (106bF); a step (D) for forming a second electrode material layer (107M); and a step (T) for carrying out heat treatment of at least the first tantalum oxide material layer (106aF) after the step (B) for forming the first tantalum oxide material layer (106aF) and before the step (D) for forming the second electrode material layer (107M). The oxygen content of either of the first tantalum oxide material layer (106aF) or the second tantalum oxide material layer (106bF) is higher than the oxygen content of the other.
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Inventors:
NINOMIYA TAKEKI
HAYAKAWA YUKIO
MIKAWA TAKUMI
TAKAGI TAKESHI
HAYAKAWA YUKIO
MIKAWA TAKUMI
TAKAGI TAKESHI
Application Number:
PCT/JP2012/000559
Publication Date:
August 09, 2012
Filing Date:
January 30, 2012
Export Citation:
Assignee:
PANASONIC CORP (JP)
NINOMIYA TAKEKI
HAYAKAWA YUKIO
MIKAWA TAKUMI
TAKAGI TAKESHI
NINOMIYA TAKEKI
HAYAKAWA YUKIO
MIKAWA TAKUMI
TAKAGI TAKESHI
International Classes:
H01L27/105; H01L45/00; H01L49/00
Domestic Patent References:
| WO2010038423A1 | 2010-04-08 |
Foreign References:
| JP2010251352A | 2010-11-04 | |||
| JP2009124167A | 2009-06-04 | |||
| JP2010226058A | 2010-10-07 |
Attorney, Agent or Firm:
NII, Hiromori (JP)
New house Extensive 守 (JP)
New house Extensive 守 (JP)
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