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Patent Searching and Data


Title:
METHOD FOR MANUFACTURING WIRE SAW APPARATUS AND WIRE SAW APPARATUS
Document Type and Number:
WIPO Patent Application WO/2017/183295
Kind Code:
A1
Abstract:
The present invention is a method for manufacturing a wire saw apparatus that has a wire supply reel, a long roller, wire guides, a wire winding reel, and a tension arm that is controlled so as to operate within a set control angle ±A (°) and is for applying tension on the wire. The method for manufacturing a wire saw apparatus comprises: a step for measuring the surface roughness Rmax of the long roller; a step for measuring, while extending the wire from the wire supply reel, the angle a (°) of the tension arm when the angle of the tension arm swings outside of the set range for the set control angle; a step for calculating R1×2×A/(|a|+A)=R2 when the measured long roller surface roughness Rmax is R1 (µm); and a step for making the long roller surface roughness Rmax to be the calculated numerical value R2 or less. Provided thereby is a method for manufacturing a wire saw apparatus that is able to keep the tension arm from swinging widely outside of the control range.

Inventors:
USAMI Yoshihiro (Shin-Etsu Handotai Co. Ltd., 150, Aza Ohira, Oaza Odakura, Nishigo-mura, Nishishirakawa-gu, Fukushima 61, 〒9618061, JP)
Application Number:
JP2017/006980
Publication Date:
October 26, 2017
Filing Date:
February 24, 2017
Export Citation:
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Assignee:
SHIN-ETSU HANDOTAI CO.,LTD. (2-1 Ohtemachi 2-chome, Chiyoda-ku Tokyo, 04, 〒1000004, JP)
International Classes:
B24B27/06; B28D5/04; H01L21/304
Attorney, Agent or Firm:
YOSHIMIYA Mikio et al. (1st Shitaya Bldg. 8F, 6-11 Ueno 7-chome, Taito-k, Tokyo 05, 〒1100005, JP)
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