Title:
METHOD FOR MANUFACTURING X-RAY PLANAR DETECTOR, AND TFT ARRAY SUBSTRATE FOR X-RAY PLANAR DETECTOR
Document Type and Number:
WIPO Patent Application WO/2013/157231
Kind Code:
A1
Abstract:
[Problem] To improve the accuracy of inspecting a TFT array in the manufacture of an X-ray planar detector. [Solution] A TFT array substrate (30) for an X-ray planar detector is manufactured, a common wiring ring (32) being provided around the portion of the X-ray planar detector where a TFT array (21) is to be formed, and the TFT array substrate (30) being connected to signal lines (53) and scan lines (54) via pairs of protective diodes (34) connected in two parallel groups having mutually opposite polarities. When the TFT array substrate (30) for an X-ray planar detector is inspected, a reference bias voltage equal to that of the amplifier of an inspection circuit is applied from external voltage application pads provided in the vicinity of connections between the common wiring ring and the protective diodes on the same side as the signal lines; a signal for switching on a thin-film transistor (41) is applied to scan-line connection pads (24); and electrical signals flowing through the signal lines (53) are read from signal-line connection pads (23).
Inventors:
IWATA HIROSHI (JP)
IKEDA MITSUSHI (JP)
IKEDA MITSUSHI (JP)
Application Number:
PCT/JP2013/002486
Publication Date:
October 24, 2013
Filing Date:
April 11, 2013
Export Citation:
Assignee:
TOSHIBA KK (JP)
TOSHIBA ELECTRON TUBES & DEVIC (JP)
TOSHIBA ELECTRON TUBES & DEVIC (JP)
International Classes:
H01L27/146; H01L27/144
Foreign References:
| JP2004303925A | 2004-10-28 | |||
| JP2009170768A | 2009-07-30 | |||
| JP2008305959A | 2008-12-18 |
Attorney, Agent or Firm:
HYUGAJI, Masahiko et al. (JP)
Masahiko Hiugaji (JP)
Masahiko Hiugaji (JP)
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