Title:
METHOD OF MEASURING MICRO-OBJECTS AND DEVICE THEREFOR
Document Type and Number:
WIPO Patent Application WO/1994/028373
Kind Code:
A1
Abstract:
The invention relates to measurement techniques and in particular to optical methods for contactless measurement, and may be used in optics, solid body physics, microelectronics, biology and medicine. It provides increased spatial resolution compared with conventional limits, increased precision of measurement in a phase microscope containing a coherent illumination source, double beam interferometer and coordinate-sensitive non-integrating photoreceiver, and scanning, phase measuring and indicating units. According to the method, on modulation of the carrier wave phase, its rate of change with time dphi/dt on a linear portion and the period T of the modulation function satisfy the relation T/pi.dphi/dt = n, where n = 1, 2, 3, .... By synchronous interruption of the working signal, filtering it at frequency F = 1/2pi.dphi/dt it is transformed into a quasi-harmonic while preserving phase information on the wave dissipated by the object, and the phase value at each point of the image is measured according to the temporal position of the zero value of the transformed signal. The device includes a filter tuned to a frequency related to the rate of change of the carrier wave phase, a unit interrupting the basic signal, means for controlling filter bandwidth and amplifying the working signal, and a control signal circuit for compensating external acoustic effects.
Inventors:
TYCHINSKY VLADIMIR PAVLOVICH (RU)
MASALOV IGOR NIKOLAEVICH (RU)
MASALOV IGOR NIKOLAEVICH (RU)
Application Number:
PCT/RU1994/000113
Publication Date:
December 08, 1994
Filing Date:
May 27, 1994
Export Citation:
Assignee:
TYCHINSKY VLADIMIR PAVLOVICH (RU)
MASALOV IGOR NIKOLAEVICH (RU)
MASALOV IGOR NIKOLAEVICH (RU)
International Classes:
G01B11/02; (IPC1-7): G01B9/02; G01B11/02
Foreign References:
| SU1548669A1 | 1990-03-07 | |||
| SU1681169A1 | 1991-09-30 | |||
| SU1597541A1 | 1990-10-07 | |||
| SU1231408A1 | 1986-05-15 | |||
| SU1670408A1 | 1991-08-15 | |||
| US4515478A | 1985-05-07 | |||
| US4660979A | 1987-04-28 | |||
| US4732483A | 1988-03-22 |
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