Title:
METHOD FOR MEASURING OPTICAL CONSTANT OF FLUORINE-CONTAINING ORGANOSILICON COMPOUND THIN FILM
Document Type and Number:
WIPO Patent Application WO/2021/024895
Kind Code:
A1
Abstract:
Provided is a method that can directly measure optical constants (refractive index n, and extinction coefficient κ) of a fluorine-containing organosilicon compound thin film having a homogeneous surface with a low surface roughness or small haze value, by ellipsometry, with good accuracy and good reproducibility. This method for measuring optical constants of a fluorine-containing organosilicon compound thin film has: a step for forming, on a substrate, a fluorine-containing organosilicon compound thin film which has, as a surface roughness, an arithmetic mean roughness of less than 1.0 nm, and has a root mean square roughness of less than 2.0 nm, a haze value of less than 0.3, and a film thickness of 3-10 nm; and a step for measuring, by ellipsometry, the optical constants of the thin film formed on the substrate.
Inventors:
UCHIDA TAKASHI (JP)
Application Number:
PCT/JP2020/029192
Publication Date:
February 11, 2021
Filing Date:
July 30, 2020
Export Citation:
Assignee:
SHINETSU CHEMICAL CO (JP)
International Classes:
C08G65/336; G01J4/04; G01N21/41; G01N21/49; G02B1/18
Domestic Patent References:
| WO2016068112A1 | 2016-05-06 | |||
| WO2014069250A1 | 2014-05-08 | |||
| WO2019073946A1 | 2019-04-18 | |||
| WO2017212850A1 | 2017-12-14 |
Foreign References:
| JP2007062101A | 2007-03-15 | |||
| JP2018083748A | 2018-05-31 | |||
| US20080284320A1 | 2008-11-20 | |||
| JP2016210854A | 2016-12-15 | |||
| JPS5761305B2 | 1982-12-23 | |||
| JPH0151279B2 | 1989-11-02 |
Other References:
TONEY MICHAEL F., MATE C.MATHEW, LEACH K.AMANDA, POCKER DARYL: "Thickness Measurements of Thin Perfluoropolyether Polymer Films on Silicon and Amorphous-Hydrogenated Carbon with X- Ray Reflectivity, ESCA and Optical Ellipsometry", JOURNAL OF COLLOID AND INTERFACE SCIENCE, vol. 225, no. 1, 2000, pages 219 - 226, XP055791431, DOI: 10.1006/jcis.2000.6752
PHYS. CHEM. MINERALS, vol. 16, 1988, pages 286 - 290
See also references of EP 4011935A4
PHYS. CHEM. MINERALS, vol. 16, 1988, pages 286 - 290
See also references of EP 4011935A4
Attorney, Agent or Firm:
USHIKI & ASSOCIATES (JP)
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