Title:
METHOD FOR MEASURING QUANTITATIVE TEMPERATURE AND THERMAL CONDUCTIVITY USING A SCANNING THERMAL MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2011/002201
Kind Code:
A3
Abstract:
The present invention relates to a scanning thermal microscope which scans a specimen at a nanoscale resolution to display thermal characteristics or the like of the specimen in images, and to a method for measuring quantitative temperature and thermal conductivity using the scanning thermal microscope. Particularly, the present invention proposes a scanning thermal microscope and a method for measuring quantitative temperature and thermal conductivity using the scanning thermal microscope, wherein the method comprises: a step of scanning a specimen while a probe of the scanning thermal microscope contacts the specimen, to measure the temperature (that is, a contact mode temperature) of the specimen; a step of scanning the specimen multiple times in accordance with the height of the probe of the scanning thermal microscope from the specimen, to measure the temperature (that is, a contactless mode temperature) of the specimen; a step of calculating an interpolating temperature, in which the height of the probe from the specimen is zero, by an extrapolation from the contactless mode temperature obtained by the multiple scanning operations; and a step of acquiring a local quantitative temperature and thermal conductivity by comparing the contact mode temperature with the interpolating temperature.
Inventors:
KWON OH MYOUNG (KR)
KIM KYEONG-TAE (KR)
KIM KYEONG-TAE (KR)
Application Number:
PCT/KR2010/004204
Publication Date:
April 14, 2011
Filing Date:
June 29, 2010
Export Citation:
Assignee:
UNIV KOREA RES & BUS FOUND (KR)
KWON OH MYOUNG (KR)
KIM KYEONG-TAE (KR)
KWON OH MYOUNG (KR)
KIM KYEONG-TAE (KR)
International Classes:
G01Q60/58; G01N25/18
Foreign References:
| US7448798B1 | 2008-11-11 | |||
| US5441343A | 1995-08-15 | |||
| US6487515B1 | 2002-11-26 |
Other References:
"D.C. scanning thermal microscopy: Characterisation and interpretation of the measurement.", INTERNATIONAL JOURNAL OF THERMAL SCIENCES., vol. 40, no. ISS.11, November 2001 (2001-11-01), pages 949 - 958
Attorney, Agent or Firm:
B&IP-JOOWON PATENT AND LAW FIRM (Construction Center71-2, Nonhyeon-Dong, Gangnam-Gu, Seoul 135-701, KR)
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