Title:
METHOD FOR MEASURING STRESS GRADIENTS OF THIN FILM IN DIFFERENT DIRECTIONS
Document Type and Number:
WIPO Patent Application WO/2022/088336
Kind Code:
A1
Abstract:
A method for measuring stress gradients of a thin film in different directions, comprising the steps of: obtaining a slope equivalent coefficient KX1 based on an S11 stress gradient and a slope equivalent coefficient KX2 based on an S22 stress gradient of the thin film in a first direction by means of simulation (T1); obtaining a slope equivalent coefficient KY1 based on the S11 stress gradient and a slope equivalent coefficient KY2 based on the S22 stress gradient of the thin film in a second direction by means of simulation (T2); obtaining slope K1 of the thin film in the first direction and slope K2 of the thin film in the second direction by means of an actual test (T3); and calculating stress gradients of the thin film in the first direction and the second direction according to KX1, KX2, KY1, KY2, K1, and K2 (T4). The method is higher in measurement accuracy and simpler.
Inventors:
SHEN YU (CN)
TONG BEI (CN)
SHI ZHENGYU (CN)
DUAN LIAN (CN)
TONG BEI (CN)
SHI ZHENGYU (CN)
DUAN LIAN (CN)
Application Number:
PCT/CN2020/131403
Publication Date:
May 05, 2022
Filing Date:
November 25, 2020
Export Citation:
Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
International Classes:
G01N3/20; G01L5/00
Foreign References:
| CN101403693A | 2009-04-08 | |||
| CN102564661A | 2012-07-11 | |||
| CN104458072A | 2015-03-25 | |||
| CN105628277A | 2016-06-01 | |||
| CN111595938A | 2020-08-28 | |||
| CN107991174A | 2018-05-04 | |||
| JP2003315171A | 2003-11-06 |
Attorney, Agent or Firm:
SHENZHEN JUNXINCHENG INTELLECTUAL PROPERTY FIRM (GENERAL PARTNERSHIP) (CN)
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