Title:
METHOD FOR MEASURING WARPAGE DEGREE OF PRODUCT, AND APPARATUS FOR PERFORMING SAME
Document Type and Number:
WIPO Patent Application WO/2022/097866
Kind Code:
A1
Abstract:
A method for measuring the warpage degree of a product comprises the steps of: measuring the height, excluding a region of one part, of the surface of a target product, and using the measured height to estimate the height of the region of one part excluded during height measurement; and measuring the warpage degree of the target product by using the measured height and the estimated height.
Inventors:
YOON KIWOOK (KR)
KIM KI TAE (KR)
AHN JUNGMIN (KR)
KIM KI TAE (KR)
AHN JUNGMIN (KR)
Application Number:
PCT/KR2021/007283
Publication Date:
May 12, 2022
Filing Date:
June 10, 2021
Export Citation:
Assignee:
LAONPEOPLE INC (KR)
International Classes:
G01M5/00; G01B11/06; G06T7/60
Foreign References:
| JPH05161002A | 1993-06-25 | |||
| JPH1093777A | 1998-04-10 | |||
| KR20180024071A | 2018-03-08 | |||
| US20060077400A1 | 2006-04-13 | |||
| KR20170008654A | 2017-01-24 |
Attorney, Agent or Firm:
ISQUARE PATENT & LAW FIRM (KR)
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