Title:
METHOD OF MULTIFUNCTIONAL SURFACE TREATMENT, AND DEVICE FOR IMPLEMENTING SAME
Document Type and Number:
WIPO Patent Application WO/1998/032892
Kind Code:
A1
Abstract:
The present invention concerns a method of multifunctional surface treatment, involving a cleaning process and a subsurface plasma coating, whereby the mixture is injected in a gas phase onto the surface to be treated, across through holes provided in the working surface of the anode system. The surface treatment device contains a source and a chamber in which are placed the object to be treated in the working surface as well as the anode and cathode systems. The inventive device is characterized by the presence of a reactor mounted on the anode system and an electrolyte container, arranged inside the chamber and connected to said anode system. The invention enables the surface cleaning to be improved, the operational life of the coating to be guaranteed and the technical process to be accelerated.
Inventors:
Ryabkov, Danila Vitalievich (ul. Kargapolskaya, 12-60 Moscow, 2, 12756, RU)
Application Number:
PCT/RU1997/000253
Publication Date:
July 30, 1998
Filing Date:
August 12, 1997
Export Citation:
Assignee:
Ryabkov, Danila Vitalievich (ul. Kargapolskaya, 12-60 Moscow, 2, 12756, RU)
International Classes:
C23C26/00; C23C4/12; C23C16/02; C23C16/453; C23C16/455; C23C16/503; C23C16/54; H01J37/32; C23C16/44; (IPC1-7): C23C16/44