Title:
A METHOD OF POLISHING A WORKPIECE WITH AN ABRASIVE SEGMENT COMPRISING ABRASIVE AGGREGATES HAVING SILICON CARBIDE PARTICLES
Document Type and Number:
WIPO Patent Application WO/2013/003816
Kind Code:
A3
Abstract:
A method of polishing a workpiece can include placing a workpiece on a support structure. In an embodiment, the method can also include contacting the workpiece with an abrasive segment. The abrasive segment can include a plurality of abrasive aggregates that include silicon carbide particles bound together in a binder material. Additionally, the method can include moving the abrasive segment and the workpiece relative to each other.
Inventors:
WANG GUAN (US)
BOUSSANT-ROUX YVES (FR)
BOUSSANT-ROUX YVES (FR)
Application Number:
PCT/US2012/045119
Publication Date:
April 04, 2013
Filing Date:
June 29, 2012
Export Citation:
Assignee:
SAINT GOBAIN CERAMICS (US)
International Classes:
B24B37/22; B24D3/02
Foreign References:
| US20060094340A1 | 2006-05-04 | |||
| US20040018802A1 | 2004-01-29 | |||
| EP1702714A1 | 2006-09-20 | |||
| US20070026774A1 | 2007-02-01 |
Attorney, Agent or Firm:
ABEL LAW GROUP, LLP et al. (Bldg. 1 Ste. 21, Austin Texas, US)
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