Title:
METHOD OF PREPARING AND ANALYZING THIN FILMS
Document Type and Number:
WIPO Patent Application WO/2022/016502
Kind Code:
A1
Abstract:
A method of preparing a focused ion beam (FIB) sample and analyzing the sample in an electron microscope system is provided. The method can include forming, over a substrate, a target film having a thickness of less than a threshold corresponding to a limit for FIB requirements (S301), and forming a supporting film over the target film (S302). The method can also include obtaining a FIB sample that includes a portion of the target film and a portion of the supporting film (S303). The method can further include analyzing the obtained portion of the target film in an electron microscope system (S304).
Inventors:
LIU JING (CN)
Application Number:
PCT/CN2020/104336
Publication Date:
January 27, 2022
Filing Date:
July 24, 2020
Export Citation:
Assignee:
YANGTZE MEMORY TECH CO LTD (CN)
International Classes:
G01N1/28; G01N23/2202; G01N23/2251
Foreign References:
| US20130143412A1 | 2013-06-06 | |||
| CN105510092A | 2016-04-20 | |||
| CN102269772A | 2011-12-07 | |||
| CN104241156A | 2014-12-24 | |||
| CN106289892A | 2017-01-04 | |||
| CN107271230A | 2017-10-20 | |||
| CN110553885A | 2019-12-10 | |||
| CN110530700A | 2019-12-03 | |||
| CN110579495A | 2019-12-17 | |||
| JP3321533B2 | 2002-09-03 |
Attorney, Agent or Firm:
NTD UNIVATION INTELLECTUAL PROPERTY AGENCY LTD. (CN)
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