Title:
METHOD FOR PREPARING CAVITY TYPE BULK ACOUSTIC WAVE RESONATOR AND CAVITY TYPE BULK ACOUSTIC WAVE RESONATOR
Document Type and Number:
WIPO Patent Application WO/2020/228285
Kind Code:
A1
Abstract:
The present invention relates to the technical field of preparation of cavity type bulk acoustic wave resonators, and in particular to a method for preparing a cavity type bulk acoustic wave resonator and the cavity type bulk acoustic wave resonator. The method comprises the following steps of: performing damage treatment on a single crystal wafer by means of a single crystal wafer damage treatment process so as to obtain a single crystal wafer having a damage layer; successively preparing a lower electrode and a sacrificial layer on the lower surface of the single crystal wafer having the damage layer, preparing, on the surface of the sacrificial layer, a polymer bonding layer of which the thickness is greater than or equal to the sum of the thicknesses of the sacrificial layer and the lower electrode, and performing bonding process treatment and single crystal wafer splitting process treatment on a substrate and the polymer bonding layer then to obtain a single crystal film having the lower electrode; preparing an upper electrode on the upper surface of the single crystal film having the lower electrode, forming a sacrificial layer release hole communicated with the sacrificial layer in the upper surface of the single crystal film layer, and releasing the sacrificial layer to obtain a cavity type bulk acoustic wave resonator. The manufactured cavity type bulk acoustic wave resonator has a high Q value.
Inventors:
SHUAI YAO (CN)
LUO WENBO (CN)
WU CHUANGUI (CN)
LUO WENBO (CN)
WU CHUANGUI (CN)
Application Number:
PCT/CN2019/118089
Publication Date:
November 19, 2020
Filing Date:
November 13, 2019
Export Citation:
Assignee:
UNIV ELECTRONIC SCI & TECH CHINA (CN)
International Classes:
H03H3/02
Foreign References:
| CN110212882A | 2019-09-06 | |||
| CN106209002A | 2016-12-07 | |||
| CN104579233A | 2015-04-29 | |||
| CN105262455A | 2016-01-20 | |||
| US20030199105A1 | 2003-10-23 |
Attorney, Agent or Firm:
UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY CENTER OF PATENT (CN)
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