Title:
METHOD FOR PREPARING DUSTPROOF SURFACE
Document Type and Number:
WIPO Patent Application WO/2018/133239
Kind Code:
A1
Abstract:
A method for preparing a dustproof surface, comprising the following steps: (1) placing a substrate in a reaction cavity of a plasma chamber, continuously vacuumizing the reaction cavity till the vacuum degree in the reaction cavity reaches 10-200 millitorr, and introducing an inert gas or nitrogen; (2) introducing monomer vapor till the vacuum degree reaches 30-300 millitorr, enabling plasma discharge, the plasma discharge power being 2-150 W and the discharge time being 600-7,200 s, and performing chemical vapor deposition to prepare a compact coating; after the deposition of the compact coating is completed, adjusting the plasma discharge power to 160-500 W and the discharge time to 60-1,000 s, and performing chemical vapor deposition to prepare a rough coating; and preparing, on the surface of the substrate, a dustproof surface with an inner layer being a compact coating and an outer layer being a rough coating, the component of the monomer vapor introduced in step (2) being a mixture of at least one monofunctional unsaturated fluorocarbon resin and at least one polyfunctional unsaturated hydrocarbon derivative, the mass fraction of the polyfunctional unsaturated hydrocarbon derivative in the monomer vapor being 10-80％; and (3) stopping the plasma discharge, stopping introducing the monomer vapor, continuously vacuumizing, after maintaining the vacuum degree of the reaction cavity at 10-200 millitorr, introducing air till the pressure reaches an atmospheric pressure, and then taking out the substrate.
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Inventors:
ZHONG JIAN (CN)
Application Number:
PCT/CN2017/081797
Publication Date:
July 26, 2018
Filing Date:
April 25, 2017
Export Citation:
Assignee:
JIANGSU FAVORED NANOTECHNOLOGY CO LTD (CN)
International Classes:
C23C16/513; C23C16/02; C23C16/455; C23C28/00
Foreign References:
| CN105705590A | 2016-06-22 | |||
| CN1953822A | 2007-04-25 | |||
| US20080146734A1 | 2008-06-19 |
Other References:
YU , DONGYUN: "Preparation of the Superhydrophobic Composite Coatings on the Carbon Steel Surface and their Anti-Corrosion Properties in Seawater", SCIENCE -ENGINEERING (A) , CHINA MASTER'S THESES FULL-TEXT DATABASE, 15 January 2015 (2015-01-15), ISSN: 1674-0246
YE ET AL.: "Preparation and Performance of Multilayer Films by RF Plasma Polymerization", JOURNAL OF TIANJIN UNIVERSITY OF TECHNOLOGY, vol. 24, no. 4, 31 August 2008 (2008-08-31), ISSN: 1673-095X
YE ET AL.: "Preparation and Performance of Multilayer Films by RF Plasma Polymerization", JOURNAL OF TIANJIN UNIVERSITY OF TECHNOLOGY, vol. 24, no. 4, 31 August 2008 (2008-08-31), ISSN: 1673-095X
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