METHOD FOR PROCESSING ARRAY MICRO-NANO STRUCTURE USING ULTRAFAST LASER COMBINED PULSE SEQUENCE

Title:

METHOD FOR PROCESSING ARRAY MICRO-NANO STRUCTURE USING ULTRAFAST LASER COMBINED PULSE SEQUENCE

Document Type and Number:

WIPO Patent Application WO/2020/056590

Kind Code:

A1

Abstract:

Provided is a method for processing an array micro-nano structure using an ultrafast laser combined pulse sequence, the method comprising the following steps: grinding, polishing, cleaning and drying a surface of a workpiece, and then fixing the workpiece on an ultra-precision platform; starting a laser generator using an industrial control computer by means of a laser controller to emit a laser beam to the surface of the workpiece to perform laser focusing, and then adjusting the ultra-precision platform to determine a workpiece processing region; during processing, selecting, by means of the laser controller, a femtosecond laser device or a picosecond laser device to emit laser beams to achieve free combination of ultrafast laser pulses by means of an optical path switching module, and performing processing according to the desired micro-nano structure; and after processing, taking down the workpiece, and cleaning and drying the workpiece to obtain a finished product. The present invention provides a new combination method for laser processing technology in micro-nano processing for a material, and a femtosecond laser or a picosecond laser can be selected according to processing requirements and flexible combination for ultrafast laser pulse sequences can be performed by means of an optical path switching method, thereby effectively improving the processing efficiency and quality of a micro-nano structure.

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Inventors:

WONG CHENGYONG (CN)
WONG HONGJIAN (CN)
LIN HUATAI (CN)

Application Number:

PCT/CN2018/106255

Publication Date:

March 26, 2020

Filing Date:

September 18, 2018

Export Citation:

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Assignee:

UNIV GUANGDONG TECHNOLOGY (CN)

International Classes:

B23K26/00

Foreign References:

CN106964903A	2017-07-21
CN106300000A	2017-01-04

Attorney, Agent or Firm:

HUIZHOU CHOYES INTELLECTUAL PROPERTY AGENCY (GERNAL PARTNERSHIP) (CN)

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