METHOD FOR PRODUCING AT LEAST ONE OPTOELECTRONIC SEMICONDUCTOR COMPONENT AND OPTOELECTRONIC SEMICONDUCTOR

COMPONENT

This patent application claims the priority of application with the application number 62/425,574, the disclosure content of which is hereby incorporated by reference.

FIELD OF THE INVENTION

A method for producing at least one optoelectronic

semiconductor component is specified. Furthermore an

optoelectronic semiconductor component is specified.

BACKGROUND OF THE INVENTION

Semiconductor conversion elements having epitaxial layers can be used as light converting elements. Traditional conversion elements are mainly dielectric with a very wide band gaps

(E _g >> 5 eV) and not semiconductors. And, light conversion phenomenon is due to rare-earth activator ion doped into these dielectric materials. Typically indium-gallium-nitride

(InGaN) blue LED is grown on sapphire via MOCVD thin film deposition method and traditional conversion elements are attached to the top surface of InGaN blue LED via adhesive. And, the conversion elements absorb the blue wavelength of an LED and converts into another wavelength depending on the rare-earth activator ion. The adhesive can be an organic material, for example silicone. The converting element is glued with silicone to the surface of the LED chip. However, this constitutes a thick glue interface between the LED chip and the traditional converter element. Such architecture does not prevent crosstalk in pixelated LED concepts and calls for a thinner interface between the LED chip and the converter element. One other idea is that the substrate, for example a wafer, that is used brought for conversion can be joined with the LED wafer by use of direct bonding or a wafer bonding that contains some additional material, for example silicon dioxide-coated wafers. The thickness of the traditional conversion element also needs to be reduced in order to avoid cross talk in pixelated LED concepts. This could be solved by using semiconductor converter elements as invented here.

SUMMARY OF THE INVENTION In accordance with at least one embodiment the method for producing at least one optoelectronic semiconductor component comprises providing a semiconductor layer sequence, which comprises a first semiconductor material, which emits a first radiation in operation, applying a conversion element at least partially on the semiconductor layer sequence via a cold method, wherein the conversion element comprises a second semiconductor material, and wherein the second

semiconductor material converts the first radiation into a second radiation in operation.

In accordance with at least one embodiment the method for producing at least one optoelectronic semiconductor

component, the method comprising:

- Providing a semiconductor layer sequence, which was grown up or grown on a substrate and comprises a first

semiconductor material, which emits a first radiation in operation, - Applying a conversion element at least partially on the semiconductor layer sequence via a cold method,

wherein the conversion element comprises a second

semiconductor material, and

wherein the second semiconductor material converts the first radiation into a second radiation in operation.

According to one embodiment of the method, the method

comprises the step of providing a semiconductor layer

sequence. The optoelectronic semiconductor component can comprise one or a plurality of semiconductor layer sequences. The semiconductor layer sequence is preferably based on a III-V compound semiconductor material, here named as the first semiconductor material. The first semiconductor

material is, for example, a nitride compound semiconductor material such as Al _n Ini- _n - _m Ga _m N or a phosphide compound

semiconductor material such as Al _n Ini- _n - _m Ga _m P or an arsenide compound semiconductor material such as Al _n Ini- _n - _m Ga _m As , wherein in each case 0 ≤ n ≤ l, 0 ≤ m ≤ 1 and n + m ≤ 1. In this case, the semiconductor layer sequence can comprise dopants and additional constituents. For the sake of

simplicity, however, only the essential constituents of the crystal lattice of the semiconductor layer sequences, that is to say Al, As, Ga, In, N or P, are indicated, even if these can be replaced and/or supplemented in part by small amounts of further substances.

According to one embodiment the first semiconductor material is Al _n Ini- _n - _m Ga _m . n, m and n+m can be: 0 ≤ n ≤ l, 0 ≤ m ≤ 1 and/or n + m ≤ 1. The at least one semiconductor layer sequence can be grown. Particularly the semiconductor layer sequence is grown or was grown epitaxially on a substrate. According to one embodiment the substrate is based on, for example, sapphire or other ceramics, glass, glass-like materials, glass ceramics or other transparent or translucent materials or consists of the same. Alternatively the

substrate can be reflective, for example can comprise

alumina, polycrystalline alumina, other ceramics, aluminum, other metals or alanod or consists of the same.

Particularly the substrate is a wafer or a pump wafer. According to one embodiment the first semiconductor material can emit a first radiation in operation. Particularly the first radiation has a dominant wavelength of the blue and/or UV spectral range. The dominant wavelength is the wavelength of monochromatic light that would give the same visual sensation if combined in a suitable proportion with an achromatic light.

According to one embodiment the method comprises applying a conversion element on the semiconductor layer sequence. In particular the conversion element is applied on the surface facing away from the substrate on the semiconductor layer sequence. The conversion element is at least partially applied on the semiconductor layer sequence. In a preferred embodiment the conversion element is fully applied on the semiconductor layer sequence. The conversion element is applied via a cold method. Cold method means here and in the following that the method is performed at a maximum temperature of 550 °C, in particular at a maximum temperature of 400°C, for example 380°C.

According to one embodiment the cold method is sputtering or pulse laser deposition. These methods are known to a person skilled in the art and are therefore not explained in detail. The cold method can be an Aerosol Deposition Method (ADM) at room temperature. The cold method can be a pulse laser deposition (PLD) . PLD can be performed from room temperature up to at least about 700°C. The cold method can be an Atomic layer epitaxy (ALE), which can be performed up to 600°C. The cold method can be a Plasma assisted (or enhanced) MOVPE at temperature between 200°C to 600°C. According to one embodiment the cold method can be performed up to 700°C, preferably below 550°C.

The inventors have found out that the application of the conversion element via a cold method results in an

optoelectronic component which can be produced at reduced temperatures. This means that the semiconductor layer

sequence is not destroyed by applying the conversion element.

According to one embodiment of the method the conversion element comprises a second semiconductor material. The semiconductor material can be selected from the group

consisting of indium-gallium-nitride (InGaN), aluminium- gallium-indium-nitride (AlGalnN) , aluminium-gallium-indium- arsenide-phosphide (AlGalnAsP) .

According to one embodiment the second semiconductor material converts the first radiation into a second radiation in operation. The second radiation can have a dominant wavelength which is bigger than the dominant wavelength of the first radiation. Particularly the dominant wavelength of the second radiation lies in the red, green, yellow, orange spectral range.

According to one embodiment each of the first and the second semiconductor materials comprises indium. The indium content of the first semiconductor material is smaller than the indium content of the second semiconductor material. The semiconductor layer sequence can comprise or consist of indium-gallium-nitride. The indium content of indium-gallium- nitride of the semiconductor layer sequence is smaller than the indium content of the second semiconductor material which can also be indium-gallium-nitride. The content of indium influences the dominant wavelength of the first and/or second radiation. A low indium content of indium-gallium-nitride results in a first radiation of the blue spectral range. A higher indium content results in radiation of the yellow or red spectral range.

Epitaxial layers can be deposited on a pump wafer by

sputtering or pulse laser deposition (PLV) . Both techniques are potentially cold methods that allow deposition on wafers, especially partly processed or chip arrays. When indium- gallium-nitride is used, the possible amount of indium that can be deposited is much higher. Therefore green and red light can be made from indium-gallium-nitride.

According to one embodiment of the method the indium content of the second semiconductor material is between 30 atom% and 60 atom% (borders are included) . The inventors have found out that, by applying a conversion element via a cold method, a thin conversion element can be produced . According to one embodiment the conversion element is formed as a layer having a layer thickness of 20 nm to 200 nm, particularly a thickness of 25 nm to 100 nm, for example 50 nm (borders are included) . According to one embodiment the conversion element is formed as a layer having a layer thickness of larger towards 500 nm Thus the absorption can be enhanced. The layer thickness can be adapted depending on the desired color. According to one embodiment of the method an arrangement can be formed after applying the conversion element. This arrangement can then be separated in order to form a plurality of optoelectronic semiconductor components. The arrangement can be placed on a wafer and can then be

separated, for example by dicing.

According to one embodiment of the method the conversion element comprises a surface which is arranged facing away from the semiconductor layer sequence. Additionally or alternatively, the conversion element is structured. The conversion element can be structured with photolithographic steps to allow micropixel conversion.

According to one embodiment a conversion element comprises quantum well device architecture. Therefore very thin conversion elements or conversion layers can be produced. According to one embodiment the optoelectronic semiconductor component emits white radiation in operation. The white radiation is the sum of the first radiation and the second radiation. Alternatively, the optoelectronic semiconductor component emits solely the second radiation, wherein the first radiation is fully converted into the second radiation. This concept is also called full conversion.

According to one embodiment the optoelectronic semiconductor component does not comprise an adhesive layer which glues the semiconductor layer sequence to the conversion element. In other words, the conversion element is applied directly on the semiconductor layer sequence without any adhesive layer. The absence of an adhesive layer results in a direct

connection of the conversion element to the semiconductor layer sequence and will provide better thermal joint and a better thermal connection between the conversion element and the semiconductor layer sequence. According to one embodiment the conversion element is applied on the whole surface of the semiconductor layer sequence. Then the conversion element is partially removed from the surface and a third semiconductor material is applied on the area of the removed conversion element. The third

semiconductor material emits a third radiation in operation wherein the second and the third radiation are different from each other. Alternatively, the second and the third radiation have the same dominant wavelength. According to one embodiment the second and/or third radiation has a dominant wavelength in the green or red spectral range. Therefore red and green pixels can be produced next to each other directly on the semiconductor layer sequence. This means that the second and third semiconductor materials are arranged in one plane. In contrast to this, in wafer bonding processes red and green pixels will be in different planes and will have, in a side view, different heights.

A common processing is anticipated since the conversion material class is similar to that of the semiconductor layer sequence. In other words, one could use the same materials, i.e one would also use the same chemicals to get the same element. Thus the process simplifies. The Growths can be better as well.

According to one embodiment the conversion element is roughened. Therefore the out-coupling can be optimized.

According to one embodiment the optoelectronic semiconductor component comprises an absorbing layer. The absorbing layer can absorb blue radiation. The absorbing layer can be arranged on the conversion element. The absorbing layer can absorb the first radiation. This guarantees a pure colour.

According to one embodiment the removing of the conversion element can be carried out via laser liftoff. The process of laser liftoff is known to a skilled person and is therefore not explained in detail.

The invention also claims an optoelectronic semiconductor component. The optoelectronic semiconductor component is particularly producible by means of the above-mentioned method. Therefore all embodiments and definitions mentioned for the method are also valid for the optoelectronic

semiconductor component and vice versa. BRIEF DESCRIPTION OF THE DRAWINGS

A method for producing an optoelectronic semiconductor component and an optoelectronic semiconductor component are described in greater detail below on the basis of exemplary embodiments with reference to the drawings. In this case identical reference signs indicate identical elements in the individual figures. Relations to scale are not illustrated in this case. However, individual elements may be illustrated with an exaggerated size in order to afford a better

understanding .

In the figures:

Figures 1A and IB show schematic illustrations of methods for producing an optoelectronic semiconductor component described herein;

Figures 2A and 2B show schematic sectional illustrations of exemplary embodiments of optoelectronic semiconductor

components described herein; and

Figures 3A to 3C show a schematic illustration of a method for producing an optoelectronic semiconductor component described herein. DESCRIPTION OF PREFERRED EMBODIMENTS

Figure 1 schematically shows an exemplary embodiment of a method for producing at least one optoelectronic

semiconductor component. At first a semiconductor layer sequence 1 comprising a first semiconductor material 11 is provided. The first semiconductor material can be an

epitaxial material, for example indium-gallium-nitride

(InGaN) . The first semiconductor material can emit a first radiation in operation, for example having a dominant

wavelength of the blue spectral range. Via a cold method 3 a conversion element 2 is applied. A conversion element 2 is at least partially applied on the semiconductor layer sequence 1, particularly on the radiation surface of the semiconductor layer sequence. Alternatively, the conversion element 2 is fully applied on the semiconductor layer sequence 1. The conversion element 2 comprises a second semiconductor

material 21 having a second radiation 22 with a dominant wavelength which is bigger than a dominant wavelength of the first radiation 12. The second semiconductor material 21 can also be indium-gallium-nitride, but the indium content of the second semiconductor material is bigger than the indium content of the first semiconductor material 11. The indium content of the second semiconductor material 21 can be between 30 atom% and 60 atom%, for example 50 atom% .

At least one optoelectronic semiconductor component 100 results from such described method.

Figure IB shows a schematic exemplary embodiment of

optoelectronic semiconductor components 100, 101, 102. The arrangement which results after the application step of the conversion element can be separated in order to form a plurality of optoelectronic semiconductor components 100, 101 and 102. The first semiconductor material can be grown on a substrate 4, for example a sapphire wafer. The sapphire wafer can be removed later on. Figure 2A shows an exemplary embodiment of an optoelectronic semiconductor component as it is known from the prior art. The semiconductor component comprises a semiconductor layer sequence 1 which is glued to a conversion element 2 via an adhesive layer 5. The adhesive layer can be silicone. This adhesive layer is very thick and thus does not prevent crosstalk in pixelated LED concepts. Therefore thinner architectures are needed. This is achieved by a method according to claim 1 or an optoelectronic semiconductor component according to claim 18.

Figure 2B schematically shows an exemplary embodiment of an optoelectronic semiconductor component 100 described herein. This optoelectronic semiconductor component 100 differs from the component according to Figure 1A in the surface 23 of the conversion element 2. The surface 23 of the conversion element 2 is structured. The structure can be made by

photolithographic steps. Therefore micropixel conversion can be allowed.

Figures 3A to 3C show an exemplary embodiment of a method for producing an optoelectronic semiconductor component 100.

Figure 3A shows a semiconductor layer sequence 1 and a conversion element 2 which is directly arranged on a

semiconductor layer sequence 1. After the conversion element 2 is applied on the whole surface of the semiconductor layer sequence 1, the conversion element 2 is partially removed, especially in stripes, from the surface of the semiconductor layer sequence 1 (see Figure 3B) . After that a third

semiconductor material 6 can be applied on the area of the removed conversion element 2, wherein the third semiconductor material 6 emits a third radiation in operation.

Particularly, the second and the third radiations are

different from each other. For example the second radiation comprises the dominant wavelength of the red spectral range and the third radiation can have a dominant wavelength of the green spectral range. Therefore red and green pixels can be produced next to each other directly on the semiconductor layer sequence 1 at the same height or in one plane.

The semiconductor layer sequence 1 can emit blue radiation and the conversion element 2 can emit red or green radiation and the third semiconductor material 6 can emit green or red radiation so that the optoelectronic semiconductor component 100 emits white radiation in operation, here denoted as 7. The invention is not restricted by the description on the basis of the exemplary embodiments. Rather, the invention encompasses any novel features and also any combination of the features, which in particular includes any combination of features in the patent claims even if this feature or this combination itself is not explicitly specified in the patent claims or exemplary embodiments.

References

100, 101, 102 optoelectronic semiconductor components

1 semiconductor layer sequence

2 conversion element

3 cold method

4 substrate

5 adhesive or adhesive layer

6 third semiconductor material

7 sum of the radiation

11 first semiconductor material

12 first radiation

21 second semiconductor material

22 second radiation

23 surface of the conversion element

61 third radiation