METHOD FOR PRODUCING A BONDED ARTICLE INCLUDING AN ULTRA-THIN SUBSTRATE AND BONDED ARTICLE

WIPO Patent Application WO/2016/095155

A1

A method for producing a bonded article (70) comprising providing an ultra-thin substrate (1), in particular an ultra-thin glass substrate, with a first surface (1.1) and a second surface (1.2), where the ultra-thin substrate (1) is at least partially transmissible to an electromagnetic inspection radiation, and providing a support substrate (60) having a first surface and a second surface. The method comprises laminating a dark-screen film (2) on the second surface of the ultra-thin substrate (1) to produce a laminated ultra-thin substrate prior to cleaning the first surface (1.1) of the ultra-thin substrate (1). After cleaning, the first surface (1.1) of the ultra-thin substrate (1) is inspected for impurities (27) by irradiating the first surface (1.1) with the electromagnetic inspection radiation and identifying impurities (27) by way of contrast between the irradiated impurities (27) and the dark-screen film (2). If a desired cleanliness has been reached, a bonded article (70) is produced by bonding the laminated ultra-thin substrate with its first surface to the first or second surface of the support substrate (60). A bonded article (70) and a method for inspecting a surface of an ultra-thin substrate for impurities (27) are also provided.

HOU YUNFEI (CN)
QIAN PENGXIANG (CN)
LIEBALD RAINER (DE)

PCT/CN2014/094196

June 23, 2016

December 18, 2014

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SCHOTT GLASS TECHNOLOGIES SUZHOU CO LTD (CN)

G01N21/17

CN102637577A	2012-08-15
CN103115928A	2013-05-22
CN102023164A	2011-04-20
US20100266195A1	2010-10-21

SONDERHOFF & EINSEL (BEIJING) PATENT AGENCY OFFICE (Jianguomenwai Avenue 1 Chaoyang District, Beijing 4, CN)

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